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Optical Materials : Microstructuring Surfaces with Off-Electrode Plasma - Nikolay L. Kazanskiy

Optical Materials

Microstructuring Surfaces with Off-Electrode Plasma

By: Nikolay L. Kazanskiy, Vsevolod A. Kolpakov

Paperback | 10 December 2019 | Edition Number 1

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This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.

Industry Reviews

"The content of the book is systemic and it corresponds with the needs of the audience for which it is intended. Representation, form, logicality and realizability of material submission are highly appreciated, and it appears an indisputable advantage of the book. A wide range of scientists and specialists in diffractive optics, nanophotonics, ion-plasma technologies, gas discharge physics, micro- and nanoelectronics would benefit from the results represented in the book."
- Alexander G. Poleshchuk, Russian Academy of Sciences

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