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Introduction to VLSI Process Engineering - Y. Naka

Introduction to VLSI Process Engineering

By: Y. Naka (Editor), K. Sugawara (Editor), C. McGreavy (Editor)

Paperback | 21 October 2012

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Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.
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...an extremely good text... - Microelectronics Journal

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