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Introduction to VLSI Process Engineering - Y. Naka

Introduction to VLSI Process Engineering

By: Y. Naka (Editor), K. Sugawara (Editor), C. McGreavy (Editor)

Paperback | 21 October 2012

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Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.
Industry Reviews
...an extremely good text... - Microelectronics Journal

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