Microtechnology and Mems

Static and Dynamic Behavior and Aspects of Sensor Integration

By: RÃ¼diger G. Ballas

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Hardcover | 5 February 2007

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Hardcover
384 Pages

Dimensions(cm)
23.5 x 15.88 x 1.27

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An important aim of the presented book is the explanation of the application of piezoelectric materials such as piezoceramics within the wide field of electromechanical actuators and sensor technology. The reader should be presented the physical and mechanical properties of piezoceramics in a distinct way. In a next step, the reader is introduced into the mechanical description of the static behavior of piezoelectric multilayer beam bending actuators.

The description of the dynamic behavior of piezoelectric multilayered bending actuators is effected on the basis of Lagrange's formalism and Hamilton's principle. The achieved insights are used for the systematic development of the electromechanical circuit representation within the scope of the network theory for any design of piezoelectric bending actuators.

The applications of piezoelectric multilayer beam bending actuators can be extended by means of special displacement sensors allowing for the compensation of effects such as hysteresis, creep and drift being typical for piezoelectric actuators. Within the scope of the presented book, two different sensor-actuator-systems are presented being based on an integrated capacitive and inductive displacement sensor, respectively.

Analytical simulations of the static and dynamic behavior are compared to real measurement results of a specially developed piezoelectric multilayer beam bender. Here, the suitability of the developed theoretical aspects is shown in an outstanding way.

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Paperback

Published: 18th November 2010

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Focus of the book
Introduction	p. 3
Theoretical aspects and closed form analysis
Piezoelectric materials	p. 17
Linear theory of piezoelectric materials	p. 31
Theory of the static behavior of piezoelectric beam bending actuators	p. 47
Piezoelectric beam bending actuators and Hamilton's principle	p. 77
Theory of the dynamic behavior of piezoelectric beam bending actuators	p. 103
Network representation of piezoelectric multilayered bending actuators	p. 123
Measurement setup and validation of theoretical aspects
Measurement setup for piezoelectric beam bending actuators	p. 163
Measurements and analytical calculations	p. 173
Sensor integration for tip deflection measurements
Piezoelectric beam bending actuator with integrated sensor	p. 199
Tip deflection measurement - capacitive sensor principle	p. 203
Tip deflection measurement - inductive sensor principle	p. 217
Conclusion	p. 249
Appendix
Work done by stresses acting on an infinitesimal volume element	p. 257
Derivation of the coupling matrix elements	p. 261
Mechanical potential and kinetic energy	p. 279
Derivation of the electrical enthalpy	p. 281
Correlation between material parameters	p. 283
Work done by extensive dynamic quantities	p. 285
On the variation of the Lagrange function	p. 289
On the variation of the work done by extensive quantities	p. 295
On the excitation by a periodic force	p. 297
Particular solution of the differential equation for flexural vibrations	p. 299
Transition to the differential equations in complex form	p. 301
Orthogonality of different boundary conditions	p. 305
Logarithmic decrement	p. 309
Favored sensor principles and sensor signal estimation	p. 311
Methods of measuring small capacitances with high resolution	p. 327
To the output signal of the instrumentation amplifier	p. 333
Alternating magnetic field within a conductive layer	p. 335
Magnetic field calculation of a circular loop	p. 337
Table of Contents provided by Blackwell. All Rights Reserved.

Microtechnology and Mems

Static and Dynamic Behavior and Aspects of Sensor Integration

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Hardcover

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