Microsystems

By: S.G.K. Ananthasuresh (Editor)

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Hardcover | 30 November 2003

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340 Pages

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23.5 x 16.51 x 2.54

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The field of "microelectromechanical systems," or "MEMS," has gradually evolved from a "discipline" populated by a small group of researchers to an "enabling technology" supporting a variety of products in such diverse areas as mechanical and inertial sensors, optical projection displays, telecommunications equipment, and biology and medicine. Critical to the success of these products is the ability to design them, and this invariably involves detailed modeling of proposed designs. Over the past twenty years, such modeling has become increasingly sophisticated, with full suites of MEMS-oriented computer-aided-design tools now available worldwide. But there is another equally important side to the design process In my own book, Microsystem figuring out what to build in the first place. Design, I chose to emphasize the modeling aspect of design. The task of figuring out what to build was defined by a vague step called "creative thinking." I used practical product examples to illustrate the many subtle characteristics of successful designs, but I made no attempt to systematize the generation ofdesign proposals or optimized designs. That systemization is called "synthesis," which is the subjectofthis book.

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You Can Find This Book In

Non-Fiction Engineering & Technology Electronics & Communications Engineering Electronics Engineering Mechanical Engineering & Materials Mechanical Engineering Energy Technology & Engineering Electrical Engineering Technology in General Technical Design Engineering in General

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Published: 13th September 2013

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Foreword	p. ix
Contributors	p. xi
Preface	p. xiii
Introduction	p. 1
Design of Microelectromechanical Systems	p. 1
Synthesis vs. Analysis	p. 3
An example: mode shape synthesis of a bar	p. 4
Optimization as a synthesis tool	p. 5
Components of an optimal synthesis procedure	p. 8
Contents of the chapters	p. 9
Closure	p. 11
Synthesis for Mechanical Behavior	p. 13
Introduction	p. 13
Synthesis of beam-like structures	p. 15
Topology Synthesis	p. 16
Flexibility-stiffness formulation	p. 18
An accelerometer with a built-in displacement amplifier	p. 20
A micromechanical AND logic gate	p. 21
Synthesized solutions as design aids	p. 25
Flexibility-strength formulation	p. 25
Modeling stress constraints	p. 26
Sensitivity analysis for stress constraints	p. 27
An example	p. 31
Synthesis for dynamic attributes	p. 31
Synthesis for desired natural frequencies	p. 31
Synthesis for desired normal mode shapes	p. 32
Mode shape synthesis for beams	p. 21
Conclusions	p. 37
Synthesis of Electrostatically Actuated Mems	p. 43
Introduction	p. 43
Governing Equations	p. 48
Shape Synthesis of Electrostatically Driven Actuators	p. 49
Simulation of the driving force	p. 50
Sensitivity analysis	p. 52
Optimization	p. 54
An Example: Variable Comb-drive Actuators	p. 55
2-D Designs	p. 55
Driving force	p. 56
Sensitivity analysis	p. 57
The inverse problem	p. 59
3-D Design	p. 64
Driving force	p. 65
Sensitivity analysis	p. 66
The inverse problem	p. 67
Fabrication of a shaped motor - a demonstration	p. 70
SCREAM I process	p. 72
Test results	p. 75
Closure	p. 76
Synthesis Methods for Electrothermal Actuation	p. 79
Introduction	p. 79
Generalization of the BasiC electro-thermal actuator	p. 81
Changing dimensions	p. 82
Changing material properties	p. 82
Changing thermal boundary conditions	p. 83
Changing electrical boundary conditions	p. 83
Electro-thermal-compliant designs	p. 85
Modeling	p. 86
Electrical analysis	p. 88
Thermal analysis	p. 88
Elastic analysis	p. 89
Synthesis	p. 90
Design parameterization	p. 91
Problem statement	p. 93
Solution procedure	p. 93
Numerical examples	p. 95
Alternative implementation using "line elements"	p. 102
Line elements	p. 102
Finite element modeling with line elements	p. 103
Problem formulation	p. 105
Sensitivity analysis and solution procedure	p. 106
Numerical examples with line elements	p. 109
Advanced example	p. 110
MicroFabrication	p. 112
PennSOIL	p. 113
Excimer laser micromachining	p. 114
Electro-plating combined with photolithography	p. 115
Closure	p. 117
Synthesis with Piezoelectric Actuation	p. 121
Introduction	p. 121
Background Theory for Piezoelectricity	p. 124
FEM Applied to Piezoelectricity	p. 129
Flextensional Actuator Design	p. 131
Mean Transduction	p. 133
Material Model	p. 136
Formulation of Optimization Problem	p. 138
Sensitivity Analysis	p. 141
Examples	p. 142
A Multilayer Actuator	p. 143
A Flextensional Gripper	p. 145
Manufactured Prototypes	p. 148
Conclusion	p. 149
Synthesis of Piezocomposites	p. 155
Piezocomposite Design	p. 155
Performance Characteristics of Piezocomposite Materials	p. 157
Low-Frequency Applications	p. 158
High-Frequency Applications	p. 160
Homogenization Method	p. 160
Piezocomposite Design Problem	p. 170
Formulation of Optimization Problem	p. 173
Examples	p. 177
Piezocomposite Manufacturing	p. 182
Microfabrication by Coextrusion Technique	p. 183
Stereolithography Technique	p. 185
Experimental Results	p. 186
Conclusions	p. 188
Synthesis of Periodic Micro Mechanisms	p. 193
Introduction	p. 193
Numerical homogenization, FE modeling, and sensitivity analysis	p. 197
Formulation of the problem	p. 200
Numerical implementation	p. 201
Examples	p. 202
Shearing materials	p. 202
Negative Poisson's ratio matrials	p. 203
Extremal thermal expansion coefficient	p. 203
Piezoelectric transducers	p. 208
Wave propagation	p. 208
Modeling of wave propagation	p. 210
Concluding remarks	p. 216
Process Synthesis	p. 223
Introduction	p. 223
State-space representation	p. 225
Planar device representation	p. 227
Basic synthesis method	p. 230
Cardinality of design space	p. 231
Granularity control through condensation	p. 234
Other miscellaneous graph-theoretical results	p. 236
Process flow construction	p. 237
Determination of selective operators	p. 242
Process flow parameters	p. 244
Software implementation	p. 252
Compiler testing	p. 254
Summary	p. 260
Mask Synthesis	p. 267
Introduction	p. 267
Terminology	p. 269
Related work	p. 270
Mask synthesis for bulk micromachining	p. 271
Mask synthesis for surface micromachining	p. 271
Mathematical framework	p. 272
Synthesis	p. 280
Deposits	p. 281
Etches	p. 281
Doping	p. 281
Generating potential mask openings	p. 284
Subdivision of mask openings	p. 285
Validating Mask Openings	p. 286
Examples	p. 290
Conclusions	p. 292
System-Level Synthesis	p. 297
MEMS Design representations	p. 297
Synthesis Methodology	p. 300
Design Variables	p. 300
Constraints	p. 302
Geometric Constraints	p. 302
Functional Constraints	p. 304
Synthesis Formulation	p. 306
Layout Generation	p. 308
Performance Models	p. 308
Synthesis Results	p. 311
Synthesis with In-plane Mode Separation Constraints	p. 311
Synthesis with Out-of-plane Mode Separation Constraints	p. 312
Summary	p. 313
Index	p. 317
Table of Contents provided by Ingram. All Rights Reserved.

Microsystems

At a Glance

Hardcover

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Paperback

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