Microsystems

1 Introduction.- 1. Design of Microelectromechanical Systems.- 2. Synthesis vs. Analysis.- 2.1 An example: mode shape synthesis of a bar.- 3. Optimization as a synthesis tool.- 3.1 Components of an optimal synthesis procedure.- 4. Contents of the chapters.- 5. Closure.- 2 Synthesis for Mechanical Behavior.- 1. Introduction.- 2. Synthesis of beam-like structures.- 3. Topology Synthesis.- 3.1 Flexibility-stiffness formulation.- 3.1.1 An accelerometer with a built-in displacement amplifier.- 3.1.2 A micromechanical AND logic gate.- 3.1.3 Synthesized solutions as design aids.- 3.2 Flexibility-strength formulation.- 3.2.1 Modeling stress constraints.- 3.2.2 Sensitivity analysis for stress constraints.- 3.2.3 An example.- 4. Synthesis for dynamic attributes.- 4.1 Synthesis for desired natural frequencies.- 4.2 Synthesis for desired normal mode shapes.- 4.2.1 Mode shape synthesis for beams.- 5. Conclusions.- 3 Synthesis of Electrostatically Actuated Mems.- 1. Introduction.- 2. Governing Equations.- 3. Shape Synthesis of Electrostatically Driven Actuators.- 3.1 Simulation of the driving force.- 3.2 Sensitivity analysis.- 3.3 Optimization.- 4. An Example: Variable Comb-drive Actuators.- 4.1 2-D Designs.- 4.1.1 Driving force.- 4.1.2 Sensitivity analysis.- 4.1.3 The inverse problem.- 4.2 3-D Design.- 4.2.1 Driving force.- 4.2.2 Sensitivity analysis.- 4.2.3 The inverse problem.- 4.3 Fabrication of a shaped motor - a demonstration.- 4.3.1 SCREAM I process.- 4.3.2 Test results.- 5. Closure.- 4 Synthesis Methods for Electrothermal Actuation.- 1. Introduction.- 2. Generalization of the BasiC electro-thermal actuator.- 2.1 Changing dimensions.- 2.2 Changing material properties.- 2.3 Changing thermal boundary conditions.- 2.4 Changing electrical boundary conditions.- 2.5 Electro-thermal-compliant designs.- 3. Modeling.- 3.1 Electrical analysis.- 3.2 Thermal analysis.- 3.3 Elastic analysis.- 4. Synthesis.- 4.1 Design parameterization.- 4.2 Problem statement.- 4.3 Solution procedure.- 5. Numerical examples.- 6. Alternative implementation using "line elements".- 6.1 Line elements.- 6.2 Finite element modeling with line elements.- 6.3 Problem formulation.- 6.4 Sensitivity analysis and solution procedure.- 6.5 Numerical examples with line elements.- 7. Advanced example.- 8. MicroFabrication.- 8.1 PennSOIL.- 8.2 Excimer laser micromachining.- 8.3 Electro-plating combined with photolithography.- 9. Closure.- 5 Synthesis with Piezoelectric Actuation.- 1. Introduction.- 2. Background Theory for Piezoelectricity.- 3. FEM Applied to Piezoelectricity.- 4. Flextensional Actuator Design.- 4.1 Mean Transduction.- 4.2 Material Model.- 4.3 Formulation of Optimization Problem.- 4.4 Sensitivity Analysis.- 4.5 Examples.- 4.5.1 A Multilayer Actuator.- 4.5.2 A Flextensional Gripper.- 4.6 Manufactured Prototypes.- 5. Conclusion.- 6 Synthesis of Piezocomposites.- 1. Piezocomposite Design.- 1.1 Performance Characteristics of Piezocomposite Materials.- 1.1.1 Low-Frequency Applications.- 1.1.2 High-Frequency Applications.- 2. Homogenization Method.- 3. Piezocomposite Design Problem.- 3.1 Formulation of Optimization Problem.- 4. Examples.- 4.1 Piezocomposite Manufacturing.- 4.1.1 Microfabrication by Coextrusion Technique.- 4.1.2 Stereolithography Technique.- 4.2 Experimental Results.- 5. Conclusions.- 7 Synthesis of Periodic Micro Mechanisms.- 1. Introduction.- 2. Numerical homogenization, FE modeling, and sensitivity analysis.- 3. Formulation of the problem.- 4. Numerical implementation.- 5. Examples.- 5.1 Shearing materials.- 5.2 Negative Poisson's ratio matrials.- 5.3 Extremal thermal expansion coefficient.- 5.4 Piezoelectric transducers.- 6. Wave propagation.- 6.1 Modeling of wave propagation.- 7. Concluding remarks.- 8 Process Synthesis.- 1. Introduction.- 2. State-space representation.- 3. Planar device representation.- 4. Basic synthesis method.- 5. Cardinality of design space.- 6. Granularity control through condensation.- 7. Other miscellaneous graph-theoretical results.- 8. Process flow construction.- 9. Determination of selective operators.- 10. Process flow parameters.- 11. Software implementation.- 12. Compiler testing.- 13. Summary.- 9 Mask Synthesis.- 1. Introduction.- 1.1 Terminology.- 2. Related work.- 2.1 Mask synthesis for bulk micromachining.- 2.2 Mask synthesis for surface micromachining.- 3. Mathematical framework.- 4. Synthesis.- 4.1 Deposits.- 4.2 Etches.- 4.3 Doping.- 4.4 Generating potential mask openings.- 4.5 Subdivision of mask openings.- 4.6 Validating Mask Openings.- 5. Examples.- 6. Conclusions.- 10 System-Level Synthesis.- 1. MEMS Design representations.- 2. Synthesis Methodology.- 2.1 Design Variables.- 2.2 Constraints.- 2.2.1 Geometric Constraints.- 2.2.2 Functional Constraints.- 2.3 Synthesis Formulation.- 2.4 Layout Generation.- 3. Performance Models.- 4. Synthesis Results.- 4.1 Synthesis with In-plane Mode Separation Constraints.- 4.2 Synthesis with Out-of-plane Mode Separation Constraints.- 5. Summary.