| Designing of Evacuation Systems | p. 1 |
| Selection of Pumping Speed | p. 2 |
| Pumping-down Characteristics | p. 2 |
| Steady-State Evacuation | p. 3 |
| Roughing System | p. 3 |
| Backstreaming of RP Oil Vapor | p. 4 |
| Backstreaming of DP Oil Vapor | p. 6 |
| Overload in High-Vacuum Evacuation Systems | p. 8 |
| DP In-Series System | p. 14 |
| Ultrahigh Vacuum Electron Microscopes | p. 27 |
| Know-how Technology in Designing UHV Evacuation Systems | p. 31 |
| References | p. 32 |
| Vacuum Pumps | p. 35 |
| Mechanical Pumps | p. 35 |
| Diffusion Pumps | p. 38 |
| Turbomolecular Pumps | p. 41 |
| Dry Vacuum Pumps | p. 45 |
| Cryopumps | p. 51 |
| Vapor Pressures for Gases | p. 55 |
| Sputter Ion Pumps | p. 56 |
| Noble Pumps for Inert Gases | p. 60 |
| Getter Pumps | p. 68 |
| Titanium-Sublimation Pumps | p. 68 |
| Non-Evaporable Getter (NEG) Pumps | p. 69 |
| Methods for Measuring Pumping Speeds | p. 70 |
| Orifice Method | p. 70 |
| Three-Gauge Method (Pipe Method) | p. 71 |
| Three-Point Pressure Method (3PP Method) | p. 72 |
| References | p. 76 |
| Simulation of Pressures in High-Vacuum Systems | p. 85 |
| Conventional Calculation of System Pressures | p. 85 |
| 3A Vacuum Circuits | p. 87 |
| Basic Concept of Vacuum Circuits | p. 87 |
| Designing of Vacuum Circuits | p. 89 |
| Simulation of Pressures | p. 91 |
| Resistor-Network Simulation Method | p. 91 |
| Matrix Calculation of Pressures | p. 94 |
| 3B Molecular-Flow Conductance | p. 108 |
| Conductance | p. 108 |
| Transmission Probability | p. 109 |
| 3C Gas-Flow Patterns | p. 117 |
| References | p. 119 |
| Outgassing | p. 123 |
| Process of Outgassing | p. 123 |
| Diffusion | p. 124 |
| Recombination-limited Outgassing | p. 134 |
| Data of Outgassing | p. 136 |
| Stainless Steel | p. 136 |
| Electro-polishing and Vacuum Firing | p. 137 |
| Aluminum Alloy, Copper and Titanium | p. 147 |
| Permeation Through Elastomer Seals | p. 148 |
| Evaporation | p. 156 |
| Methods for Measuring Outgassing Rates | p. 157 |
| Differential Pressure-rise Method [4-41] | p. 159 |
| Variable Conductance Method [4-43] | p. 161 |
| Conductance Modulation Method [4-44] | p. 164 |
| Two-Point Pressure Method and One-Point Pressure Method [4-45] | p. 167 |
| References | p. 168 |
| Phenomena Induced by Electron Irradiation | p. 175 |
| 5A Electron/Photon Stimulated Desorption (ESD/PSD) | p. 176 |
| 5B Polymerization of Hydrocarbon Molecules | p. 182 |
| Transport of Hydrocarbon Molecules in High Vacuum | p. 182 |
| Transport of Hydrocarbon Molecules in Ultrahigh Vacuum | p. 185 |
| Materials to be Polymerized by Electron Beam Irradiation | p. 192 |
| 5C Darkening in Secondary Electron Images in SEM | p. 195 |
| 5D Etching of Carbonaceous Specimens | p. 198 |
| References | p. 199 |
| Vacuum Gauges | p. 205 |
| Mechanical Gauges | p. 207 |
| Capacitance Manometer | p. 207 |
| Thermal Conductivity Gauges | p. 209 |
| Pirani Gauge | p. 209 |
| Viscosity Gauges | p. 211 |
| Spinning Rotor Gauge | p. 211 |
| Crystal Oscillation Gauge | p. 214 |
| Ionization Gauges | p. 217 |
| Penning Gauge | p. 217 |
| Sputter Ion Pump as a Pressure Indicator | p. 220 |
| Bayard-Alpert Ionization Gauge | p. 221 |
| Extractor Gauge | p. 228 |
| Hot-Cathode Magnetron Ionization Gauge | p. 231 |
| Cold-Cathode Ionization Gauge for UHV | p. 232 |
| Magnetic Sector [6-24] | p. 234 |
| Quadrupole Mass-Filter [6-24] | p. 236 |
| Mass Spectra Cracking Patterns | p. 238 |
| Outgassing from Ionization Gauges with Incandescent Filaments | p. 239 |
| Gas Species Emitted from Ionization Gauges with Incandescent Filaments | p. 244 |
| New Gauges for Measuring Extreme High Vacuum | p. 247 |
| References | p. 257 |
| Microdischarges in High Vacuum | p. 265 |
| 7A Microdischarges over Insulator Surfaces | p. 266 |
| Factors | p. 266 |
| Charging of Dielectric Surfaces | p. 266 |
| Gas Molecules on Insulator Surfaces | p. 275 |
| Triple Junction | p. 278 |
| Surface Flashover in SF[subscript 6] Gas | p. 280 |
| Review | p. 281 |
| 7B Microdischarges between High-Voltage Electrodes | p. 282 |
| Anode-Initiation Mechanism | p. 282 |
| Ion-Exchange Process and Total-Voltage Effect | p. 286 |
| Projection (Whisker) on Cathode | p. 291 |
| Gas Molecules on Electrode Surfaces | p. 291 |
| Ar-Glow Conditioning | p. 292 |
| High-Voltage Conditioning (HVC) | p. 293 |
| Conditioning Effect | p. 294 |
| Review | p. 296 |
| References | p. 296 |
| Emitters for Fine Electron Probes | p. 301 |
| Keywords | p. 301 |
| 8A W FE Emitter | p. 304 |
| Characteristics | p. 304 |
| Remolding | p. 306 |
| Emission Noise | p. 312 |
| Build-up Treatment | p. 317 |
| FE-Initiated Vacuum Arc | p. 318 |
| Morphological Changes of Tip | p. 320 |
| FE-Related Technology | p. 321 |
| Review | p. 324 |
| 8B ZrO/W Emitter | p. 325 |
| Characteristics | p. 325 |
| Surface Geometry | p. 326 |
| Properties | p. 329 |
| 8C LaB[subscript 6] Emitter | p. 332 |
| Characteristics | p. 332 |
| Mounting Methods | p. 333 |
| Material Loss | p. 338 |
| Properties | p. 340 |
| Review | p. 340 |
| 8D Other FE Emitters | p. 341 |
| References | p. 341 |
| Index | p. 345 |
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