Vacuum Technology

Practice for Scientific Instruments

By: Nagamitsu Yoshimura

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Hardcover | 7 December 2007

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364 Pages

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16.4 x 23.6 x 3.2

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Nanotechnology has reached a level where almost every new development and even every new product uses features of nanoscopic properties of materials. As a consequence, an enormous amount of scientific instruments is used in order to synthesize and analyze new structures and materials. Due to the surface sensitivity of such materials, many of these instruments require ultrahigh vacuum that has to be provided under extreme conditions like very high voltages.

In this book, Yoshimura provides a review of the UHV related development during the last decades. His very broad experience in the design enables him to present us this detailed reference. After a general description how to design UHV systems, he covers all important issue in detail, like pumps, outgasing, Gauges, and Electrodes for high voltages.

Thus, this book serves as reference for everybody using UVH in his scientific equipment.

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Published: 2nd November 2014

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Designing of Evacuation Systems	p. 1
Selection of Pumping Speed	p. 2
Pumping-down Characteristics	p. 2
Steady-State Evacuation	p. 3
Roughing System	p. 3
Backstreaming of RP Oil Vapor	p. 4
Backstreaming of DP Oil Vapor	p. 6
Overload in High-Vacuum Evacuation Systems	p. 8
DP In-Series System	p. 14
Ultrahigh Vacuum Electron Microscopes	p. 27
Know-how Technology in Designing UHV Evacuation Systems	p. 31
References	p. 32
Vacuum Pumps	p. 35
Mechanical Pumps	p. 35
Diffusion Pumps	p. 38
Turbomolecular Pumps	p. 41
Dry Vacuum Pumps	p. 45
Cryopumps	p. 51
Vapor Pressures for Gases	p. 55
Sputter Ion Pumps	p. 56
Noble Pumps for Inert Gases	p. 60
Getter Pumps	p. 68
Titanium-Sublimation Pumps	p. 68
Non-Evaporable Getter (NEG) Pumps	p. 69
Methods for Measuring Pumping Speeds	p. 70
Orifice Method	p. 70
Three-Gauge Method (Pipe Method)	p. 71
Three-Point Pressure Method (3PP Method)	p. 72
References	p. 76
Simulation of Pressures in High-Vacuum Systems	p. 85
Conventional Calculation of System Pressures	p. 85
3A Vacuum Circuits	p. 87
Basic Concept of Vacuum Circuits	p. 87
Designing of Vacuum Circuits	p. 89
Simulation of Pressures	p. 91
Resistor-Network Simulation Method	p. 91
Matrix Calculation of Pressures	p. 94
3B Molecular-Flow Conductance	p. 108
Conductance	p. 108
Transmission Probability	p. 109
3C Gas-Flow Patterns	p. 117
References	p. 119
Outgassing	p. 123
Process of Outgassing	p. 123
Diffusion	p. 124
Recombination-limited Outgassing	p. 134
Data of Outgassing	p. 136
Stainless Steel	p. 136
Electro-polishing and Vacuum Firing	p. 137
Aluminum Alloy, Copper and Titanium	p. 147
Permeation Through Elastomer Seals	p. 148
Evaporation	p. 156
Methods for Measuring Outgassing Rates	p. 157
Differential Pressure-rise Method [4-41]	p. 159
Variable Conductance Method [4-43]	p. 161
Conductance Modulation Method [4-44]	p. 164
Two-Point Pressure Method and One-Point Pressure Method [4-45]	p. 167
References	p. 168
Phenomena Induced by Electron Irradiation	p. 175
5A Electron/Photon Stimulated Desorption (ESD/PSD)	p. 176
5B Polymerization of Hydrocarbon Molecules	p. 182
Transport of Hydrocarbon Molecules in High Vacuum	p. 182
Transport of Hydrocarbon Molecules in Ultrahigh Vacuum	p. 185
Materials to be Polymerized by Electron Beam Irradiation	p. 192
5C Darkening in Secondary Electron Images in SEM	p. 195
5D Etching of Carbonaceous Specimens	p. 198
References	p. 199
Vacuum Gauges	p. 205
Mechanical Gauges	p. 207
Capacitance Manometer	p. 207
Thermal Conductivity Gauges	p. 209
Pirani Gauge	p. 209
Viscosity Gauges	p. 211
Spinning Rotor Gauge	p. 211
Crystal Oscillation Gauge	p. 214
Ionization Gauges	p. 217
Penning Gauge	p. 217
Sputter Ion Pump as a Pressure Indicator	p. 220
Bayard-Alpert Ionization Gauge	p. 221
Extractor Gauge	p. 228
Hot-Cathode Magnetron Ionization Gauge	p. 231
Cold-Cathode Ionization Gauge for UHV	p. 232
Magnetic Sector [6-24]	p. 234
Quadrupole Mass-Filter [6-24]	p. 236
Mass Spectra Cracking Patterns	p. 238
Outgassing from Ionization Gauges with Incandescent Filaments	p. 239
Gas Species Emitted from Ionization Gauges with Incandescent Filaments	p. 244
New Gauges for Measuring Extreme High Vacuum	p. 247
References	p. 257
Microdischarges in High Vacuum	p. 265
7A Microdischarges over Insulator Surfaces	p. 266
Factors	p. 266
Charging of Dielectric Surfaces	p. 266
Gas Molecules on Insulator Surfaces	p. 275
Triple Junction	p. 278
Surface Flashover in SF[subscript 6] Gas	p. 280
Review	p. 281
7B Microdischarges between High-Voltage Electrodes	p. 282
Anode-Initiation Mechanism	p. 282
Ion-Exchange Process and Total-Voltage Effect	p. 286
Projection (Whisker) on Cathode	p. 291
Gas Molecules on Electrode Surfaces	p. 291
Ar-Glow Conditioning	p. 292
High-Voltage Conditioning (HVC)	p. 293
Conditioning Effect	p. 294
Review	p. 296
References	p. 296
Emitters for Fine Electron Probes	p. 301
Keywords	p. 301
8A W FE Emitter	p. 304
Characteristics	p. 304
Remolding	p. 306
Emission Noise	p. 312
Build-up Treatment	p. 317
FE-Initiated Vacuum Arc	p. 318
Morphological Changes of Tip	p. 320
FE-Related Technology	p. 321
Review	p. 324
8B ZrO/W Emitter	p. 325
Characteristics	p. 325
Surface Geometry	p. 326
Properties	p. 329
8C LaB[subscript 6] Emitter	p. 332
Characteristics	p. 332
Mounting Methods	p. 333
Material Loss	p. 338
Properties	p. 340
Review	p. 340
8D Other FE Emitters	p. 341
References	p. 341
Index	p. 345
Table of Contents provided by Ingram. All Rights Reserved.

Vacuum Technology

Practice for Scientific Instruments

At a Glance

Hardcover

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