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Ultra-Clean Technology Handbook : Volume 1: Ultra-Pure Water - Ohmi

Ultra-Clean Technology Handbook

Volume 1: Ultra-Pure Water

By: Ohmi

Paperback | 30 June 2020 | Edition Number 1

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Paperback


RRP $141.00

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Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules. The volume is divided int

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