SCANNING ELECTRON MICROSCOPE OPTICS ...

By: KHURSHEED ANJAM

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Hardcover | 3 November 2010

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418 Pages

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22.86 x 15.24 x 2.39

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This book contains proposals to redesign the scanning electron microscope, so that it is more compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. It emphasizes the concepts underlying spectrometer designs in the scanning electron microscope, and spectrometers are discussed under one common framework so that their relative strengths and weaknesses can be more readily appreciated. This is done, for the most part, through simulations and derivations carried out by the author himself.The book is aimed at scientists, engineers and graduate students whose research area or study in some way involves the scanning electron microscope and/or charged particle spectrometers. It can be used both as an introduction to these subjects and as a guide to more advanced topics about scanning electron microscope redesign.

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You Can Find This Book In

Non-Fiction Engineering & Technology Mechanical Engineering & Materials Materials Science Science Science in General Scientific Equipment Microscopy Other Technologies & Applied Sciences Applied Optics Scanning Systems & Technology Technology in General

Booktopia Publisher Services World Scientific Publishing

Preface	p. vii
Conventional SEM Design	p. 1
Introduction to the SEM	p. 2
Basic principles of electron optics	p. 9
The electron gun	p. 19
Lens aberrations and primary beam probe size	p. 24
Deflection systems	p. 36
Quadrupole stigmators	p. 42
SEM output signals	p. 48
The emission hemisphere and BSE collection	p. 51
The scattered electron energy distribution	p. 53
The SE collection efficiency	p. 55
Specimen charging	p. 59
Elastic BSE imaging	p. 61
Selected SEM image examples	p. 64
Spectrometer Design Principles	p. 71
Figures of merit	p. 72
The SAM and the SEM	p. 76
The retarding field analyzer	p. 78
Deflection field analyzers	p. 83
The parallel plate analyzer	p. 83
The cylindrical mirror analyzer	p. 96
Electric sector analyzers	p. 101
Magnetic deflector analyzers	p. 113
Wien filters	p. 124
Magnetic collimation and time of flight spectrometers	p. 131
In-lens Improvements	p. 135
Magnetic immersion lenses	p. 135
Magnetic semi-in-lens designs	p. 143
Electric retarding field lenses	p. 156
Mixed field in-lens designs	p. 164
Selected in-lens image examples	p. 176
Sub-nanometer Probe Diameters	p. 185
Monochromators and immersion objective lenses	p. 185
Aberration correctors	p. 198
The helium ion microscope	p. 218
Secondary Electron Spectrometers	p. 223
Early deflection analyzers	p. 223
Retarding field analyzers	p. 226
Surface fields and signal-to-noise characteristics	p. 237
Deflection/multi-channel analyzers	p. 244
Full Range Deflector Spectrometer Designs	p. 263
First-order focusing toroidal analyzers	p. 265
A second-order focusing toroidal analyzer design	p. 270
A modified fountain analyzer design	p. 281
Full Range Parallel Energy Spectrometer Designs	p. 287
The time-of-flight spectrometer	p. 290
A Gaussian field magnetic sector	p. 293
A round magnetic beam separator	p. 301
Spectroscopic SEM Proposals	p. 319
Field Expansions	p. 327
Derivation of the Paraxial Equation	p. 337
Spherical Aberration	p. 349
Chromatic Aberration	p. 365
Multipole Lenses	p. 375
Bibliography	p. 385
Index	p. 399
Table of Contents provided by Ingram. All Rights Reserved.

SCANNING ELECTRON MICROSCOPE OPTICS ...

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Hardcover

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