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Plasma Etching : Fundamentals and Applications - M.  Sugawara

Plasma Etching

Fundamentals and Applications

By: M. Sugawara

Hardcover | 1 May 1998

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The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.

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