New Prospects of Integrating Low Substrate Temperatures with Scaling-Sustained Device Architectural Innovation

Review of Research on Scaled Device Architectures and Importance of Lower Substrate Temperature Operation of n-MOSFETs.- Review of Research on Scaled Device Architectures and Importance of Lower Substrate Temperature Operation of n-MOSFETs.- Step-by-Step Computation of Threshold Voltage as a Function of Substrate Temperatures.- Step-by-Step Computation of Threshold Voltage as a Function of Substrate Temperatures.- Simulation Outcomes For Profile of Threshold Voltage As a Function of Substrate Temperature Based on Key Device-Centric Parameters.- Simulation Outcomes For Profile of Threshold Voltage As a Function of Substrate Temperature Based on Key Device-Centric Parameters.- Scaling Projection of Long Channel Threshold Voltage Variability with Substrate Temperatures to Scaled Node.- Scaling Projection of Long Channel Threshold Voltage Variability with Substrate Temperatures to Scaled Node.- Advantage of Lower Substrate Temperature MOSFET Operation to Minimize Short Channel Effects and Enhance Reliability.- Advantage of Lower Substrate Temperature MOSFET Operation to Minimize Short Channel Effects and Enhance Reliability.- A Prospective Outlook on Implementation Methodology of Regulating Substrate Temperatures on Silicon Die.- A Prospective Outlook on Implementation Methodology of Regulating Substrate Temperatures on Silicon Die.- Summary of Research Results.- Conclusion.- References.- Authors' Biographies.