Microtechnology and Mems

By: Raja Nassar, Weizhong Dai

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Paperback | 8 December 2010

At a Glance

Paperback
280 Pages

Dimensions(cm)
23.39 x 15.6 x 1.5

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$249.75

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This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.

Industry Reviews

From the reviews:

"This book is aimed at people working on simulation and optimization process fabrication of Microelectromechanical Systems (MEMS). ... the book provides a fairly complete view of the modeling of microfabrication processes. ... 'It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications'." (Gregory Guisbiers, Physicalia, Vol. 26 (1), 2004)

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