Micro and Nanomanufacturing

By: Mark J. Jackson

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Paperback | 29 October 2010

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714 Pages

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Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems.

Micro and Nanomanufacturing provides a comprehensive treatment of established micro and nanofabrication techniques and addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials.

Engineers seeking more knowledge of how nano and micro devices are designed and fabricated will learn about: Manufacturing and fabrication techniques at the micro and nanoscales; Using bulk and surface micromachining techniques, LiGA, and deep x-ray lithography to manufacture semiconductors; Producing master molds with micromachining; The deposition of thin films, pulsed water drop machining, and nanomachining.

Mark J. Jackson is an Associate Professor in the Department of Mechanical Engineering Technology at Purdue University. His current research focuses on understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining.

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You Can Find This Book In

Non-Fiction Engineering & Technology Technology in General Nanotechnology Engineering in General Mechanical Engineering & Materials Mechanical Engineering Electronics & Communications Engineering Electronics Engineering Industrial Chemistry & Manufacturing Technologies Other Manufacturing Technologies Precision Instruments Manufacture

Energy Technology & Engineering Electrical Engineering Engineering Skills & Trades Tool Making Production & Industrial Engineering

Principles of Micro- and Nanofabrication	p. 1
Introduction	p. 1
Material Removal Rates	p. 47
Conclusions	p. 51
Problems	p. 51
References	p. 52
Microfabrication Using X-ray Lithography	p. 55
Introduction	p. 55
X-ray Lithography	p. 58
Synchrotron Radiation	p. 59
Microfabrication Process	p. 62
Methods of Resist Application	p. 83
Exposure	p. 85
Problems	p. 95
References	p. 96
Manufacturing High Aspect Ratio Microstructures	p. 99
Introduction	p. 99
Dry Etching	p. 99
Plasma Etching Processes	p. 100
Characteristics of the Plasma	p. 102
Etching of Microstructures	p. 103
Micromachining High Aspect Ratio Microstructures	p. 120
Micromolding	p. 120
Micromolding Processes	p. 121
Micromolding Tools	p. 128
Micromold Design	p. 131
Micromolding Applications	p. 131
Limitations of Micromolding	p. 132
Fabrication of Moving Microstructures	p. 132
Conclusions	p. 138
Problems	p. 138
References	p. 139
Meso-micromachining	p. 143
Introduction	p. 143
Size Effects in Micromachining	p. 144
Mechanism for Large Plastic Flow	p. 177
Inhomogeneous Microstrains	p. 178
Origins of the Size Effect	p. 180
Meso-machining Processes	p. 182
Problems	p. 188
References	p. 188
Mechanical Micromachining	p. 191
Introduction	p. 191
Microfluidic Systems	p. 191
Theory of Micromachining	p. 195
Experimental Micromachining	p. 208
Micromachining Tool Design	p. 221
High-Speed Air Turbine Spindles	p. 226
Mechanical Design of Rotors	p. 233
Discussion	p. 250
Conclusions	p. 251
Future Developments	p. 252
Problems	p. 253
References	p. 253
Microgrinding	p. 255
Introduction	p. 255
Grinding Wheels	p. 261
Conventional Grinding Processes	p. 275
Precision Grinding Processes	p. 279
Ultra Precision Grinding	p. 299
Conclusions	p. 314
Problems	p. 315
References	p. 315
Diamond Micro Cutting Tools	p. 323
Introduction	p. 323
Properties of Diamond	p. 325
History of Diamond	p. 326
CVD Diamond Technology	p. 332
CVD Diamond Processes	p. 332
Treatment of Substrate	p. 337
Modification of HFCVD Process	p. 343
Nucleation and Growth	p. 345
Deposition on 3-D Substrates	p. 356
Wear of Diamond	p. 364
Time-Modulated CVD Diamond	p. 372
Conclusions	p. 381
Problems	p. 382
References	p. 382
Laser Micro-and Nanofabrication	p. 387
Introduction	p. 387
Laser Fundamentals	p. 387
Laser Microfabrication	p. 403
Laser Nanofabrication	p. 464
Conclusions	p. 472
Problems	p. 473
References	p. 473
Micromachining Using Water Droplets	p. 475
Introduction	p. 475
Theory of Pulsed Liquid Impact	p. 476
Impact by Water Drops	p. 480
Modeling Machining Thresholds	p. 482
Comparative Results	p. 493
Material Removal Rates	p. 497
Design of Water-Based Tools	p. 499
Analysis of Space Frame	p. 500
Mode Shapes of Tetrahedral Structure	p. 504
Conclusions	p. 516
Problems	p. 518
References	p. 519
Diamond Nanogrinding	p. 521
Introduction	p. 521
Piezoelectric Nanogrinding	p. 522
Stress Analysis in Nanogrinding Grains	p. 524
Fracture Dominated Wear Model	p. 534
Nanogrinding	p. 535
Porous Nanogrinding Tools	p. 545
Laser Dressing of Tools	p. 569
Future Directions	p. 587
Problems	p. 588
References	p. 589
Nanomachining	p. 591
Introduction	p. 591
Nanometric machining	p. 592
Theoretical Basis of Nanomachining	p. 595
Implementation	p. 612
Conclusions	p. 631
Problems	p. 632
References	p. 632
Micro- and Nanomanufacturing	p. 635
Introduction	p. 635
Micromanufacturing	p. 635
Nanomanufacturing	p. 648
Commercialization Issues of Micro and Nanotechnologies	p. 672
Future Developments	p. 683
Problems	p. 684
References	p. 685
Subject Index	p. 687
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Micro and Nanomanufacturing

At a Glance

Paperback

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