Introduction to VLSI Process Engineering

By: Yuji Naka, Kagaku Kogaku Kyokai (Japan), Y. Naka (Editor)

Write A Review

Hardcover | 30 June 1993

At a Glance

Hardcover
228 Pages

Dimensions(cm)
23.39 x 15.6 x 1.42

Hardcover

$169.75

or 4 interest-free payments of $42.44 with

Ships in 7 to 10 business days

Integrated circuits are finding wider applications through a range of industries: as well as computers, they now play an important role in automobiles, manufacturing machinery and scientific instruments. This has been possible because of the greater variety of integrated circuits that are being put on even smaller chips with an increasing level of integration. This introduction presents the design principles for devices, describes the overall VLSI process, and goes on to deal with the essential manufacturing technologies and inspection procedures. Particular attention is given to achieving the high quality needed for reliable products. The final chapter is devoted to highlighting the range of unresolved problems in VLSI processing as the scale of integration grows, and providing pointers towards possible solutions.

Industry Reviews

...an extremely good text... - Microelectronics Journal

Shipping

	Standard Shipping	Express Shipping
Metro postcodes:	$9.99	$14.95
Regional postcodes:	$9.99	$14.95
Rural postcodes:	$9.99	$14.95

Orders over $79.00 qualify for free shipping.

How to return your order

At Booktopia, we offer hassle-free returns in accordance with our returns policy. If you wish to return an item, please get in touch with Booktopia Customer Care.

Additional postage charges may be applicable.

Defective items

If there is a problem with any of the items received for your order then the Booktopia Customer Care team is ready to assist you.

For more info please visit our Help Centre.

You Can Find This Book In

Non-Fiction Computing & I.T.Computer Science Computer Architecture & Logic Design Engineering & Technology Technology in General Engineering in General Biochemical Engineering Biotechnology Electronics & Communications Engineering Electronics Engineering Circuits & Components

Industrial Chemistry & Manufacturing Technologies Industrial Chemistry Other Technologies & Applied Sciences Applied Optics Mechanical Engineering & Materials Materials Science

Other Editions and Formats

Paperback

Published: 21st October 2012

View Product

Editors and contributors
Preface to the English language edition
Preface
Coming age of VLSI	p. 1
Semiconductor market	p. 7
Evolution of semiconductors	p. 22
Characteristics of VLSI	p. 50
VLSI process engineering operations	p. 71
Packaging and process monitoring technology	p. 121
Production of silicon wafers and environmental problems	p. 147
Process engineering aspects of VLSI production	p. 166
Appendix A Glossary	p. 193
Appendix B List of abbreviations	p. 198
References	p. 201
Index	p. 205
Table of Contents provided by Blackwell. All Rights Reserved.

Introduction to VLSI Process Engineering

At a Glance

Hardcover

Industry Reviews

Shipping

How to return your order

Defective items

You Can Find This Book In

Other Editions and Formats

Paperback

More in Computer Architecture & Logic Design

Parallel Computing

Design and Analysis of Algorithms

Computer Architecture

A Modern Approach

Basic Computer Architecture

Building Microservices

Designing Fine-Grained Systems 2nd Edition

Simply AI

Facts Made Fast

The Software Architect Elevator

Redefining the Architect's Role in the Digital Enterprise

Architecture Patterns with Python

Enabling Test-Driven Development, Domain-Driven Design, and Event-Driven Microservices

Computer Systems 3ed

A Programmer's Perspective, Global Edition

Developing Graphics Frameworks with Java and OpenGL

Architecting Data and Machine Learning Platforms

Enable Analytics and Ai-Driven Innovation in the Cloud

Learning Microsoft Power Automate

Improving Productivity for Business Processes and Workflows

Making Embedded Systems

2nd Edition - Design Patterns for Great Software

Platform Engineering

A Guide for Technical, Product, and People Leaders

System Design on AWS

Building and Scaling Enterprise Solutions

Learning Systems Thinking

Essential Non-Linear Skills and Practices for Software Professionals

Optical Networks and Components

Fundamentals and Advances

500 YEARS AFTER LEONARDO DA VINCI MACHINES

Towards Innovation And Control

Digital Design and Computer Architecture

ARM Edition

Clean Architecture

A Craftsman's Guide to Software Structure and Design

Introduction to High Performance Computing for Scientists and Engineers

Chapman & Hall/CRC Computational Science

The Designer's Guide to VHDL, third edition

Volume 3

Digital Design and Computer Architecture

2nd Edition

Knowledge Management

3rd Edition - Systems and Processes in the AI Era

Computer Organization and Design RISC-V Edition

2nd Edition - The Hardware Software Interface

This product is categorised by