Introduction to VLSI Process Engineering

By: Yuji Naka, Kagaku Kogaku Kyokai (Japan), Y. Naka (Editor)

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Hardcover | 30 June 1993

At a Glance

Hardcover
228 Pages

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23.39 x 15.6 x 1.42

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Integrated circuits are finding wider applications through a range of industries: as well as computers, they now play an important role in automobiles, manufacturing machinery and scientific instruments. This has been possible because of the greater variety of integrated circuits that are being put on even smaller chips with an increasing level of integration. This introduction presents the design principles for devices, describes the overall VLSI process, and goes on to deal with the essential manufacturing technologies and inspection procedures. Particular attention is given to achieving the high quality needed for reliable products. The final chapter is devoted to highlighting the range of unresolved problems in VLSI processing as the scale of integration grows, and providing pointers towards possible solutions.

Industry Reviews

...an extremely good text... - Microelectronics Journal

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Non-Fiction Computing & I.T.Computer Science Computer Architecture & Logic Design Engineering & Technology Technology in General Engineering in General Biochemical Engineering Biotechnology Electronics & Communications Engineering Electronics Engineering Circuits & Components

Industrial Chemistry & Manufacturing Technologies Industrial Chemistry Other Technologies & Applied Sciences Applied Optics Mechanical Engineering & Materials Materials Science

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Paperback

Published: 21st October 2012

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Editors and contributors
Preface to the English language edition
Preface
Coming age of VLSI	p. 1
Semiconductor market	p. 7
Evolution of semiconductors	p. 22
Characteristics of VLSI	p. 50
VLSI process engineering operations	p. 71
Packaging and process monitoring technology	p. 121
Production of silicon wafers and environmental problems	p. 147
Process engineering aspects of VLSI production	p. 166
Appendix A Glossary	p. 193
Appendix B List of abbreviations	p. 198
References	p. 201
Index	p. 205
Table of Contents provided by Blackwell. All Rights Reserved.

Introduction to VLSI Process Engineering

At a Glance

Hardcover

Industry Reviews

Shipping

How to return your order

Defective items

You Can Find This Book In

Other Editions and Formats

Paperback

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