Introduction to Focused Ion Beams

Instrumentation, Theory, Techniques and Practice

By: Lucille A. Giannuzzi (Editor), North Carolina State University Center f (Editor)

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Hardcover | 19 November 2004

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378 Pages

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23.39 x 15.6 x 2.24

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The focused ion beam (FIB) instrument has experienced an intensive period of maturation since its inception. Numerous new techniques and applications have been realized, and over the past few years, the FIB has gained acceptance as more than just an expensive sample preparation tool. It has taken its place among the suite of other instruments commonly available in analytical and forensic laboratories, universities, geological, medical and biological research institutions, and manufacturing plants. The FIB has also been used to prepare samples for numerous other analytical techniques, and offers a wide range of other capabilities. While the mainstream of FIB usage remains within the semiconductor industry, FIB usage has expanded to applications in metallurgy, ceramics, composites, polymers, geology, art, biology, pharmaceuticals, forensics, and other disciplines. New applications of FIB and dual platform instrumentation are constantly being developed for materials characterization and nanotechnology.

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The Focused Ion Beam Instrument
Ion-Solid Interactions
Focused Ion Beam Gases for Deposition and Enhanced Etch
Three-Dimensional Nanofabrication Using Focused Ion Beams
Device Edits and Modifications
The Uses of Dual Beam FIB in Microelectronic Failure Analysis
High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy
FIB for Materials Science Applications-a Review
Practical Aspects of FIB TEM Specimen Preparation
FIB Lift-Out Specimen Preparation Techniques
A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method
Dual-Beam (FIB-SEM) Systems
Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS)
Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy
Applications of FIB in Combination with Auger Electron Spectroscopy
Appendices
Index
Table of Contents provided by Publisher. All Rights Reserved.

Introduction to Focused Ion Beams

Instrumentation, Theory, Techniques and Practice

At a Glance

Hardcover

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Defective items

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