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Defect Recognition and Image Processing in Semiconductors 1997 : Proceedings of the seventh conference on Defect Recognition and Image Processing, Berlin, September 1997 - J. Doneker

Defect Recognition and Image Processing in Semiconductors 1997

Proceedings of the seventh conference on Defect Recognition and Image Processing, Berlin, September 1997

By: J. Doneker

Hardcover | 1 January 1998 | Edition Number 1

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The Defect Recognition & Image Processing series of conferences provide a valuable overview of current techniques used to assess, monitor & characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. They are written for physicists, electrical & electronic engineers researching these problems. This volume addresses advances in defect analysing techniques & instrumentation & their application to substrates, epilayers & devices; the merits & limits of characterization techniques; standardisation; correlations between defects & device performance, including degradation & failure analysis; & the adaptation & application of standard characterization techniques to new materials. It also discusses the impressive advances made possible by the increase in the number of nanoscale scanning techniques now available. It investigates defects in layers & devices, & examines the problems which have arisen in characterizing gallium nitride & silicon carbide.
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listed in SPIE-OE Reports No 174, 1998 listed in Scitech Book News, September 1998 Abstracted in INSPEC Database. in SPIE-OE Reports No 174, 1998 listed in Scitech Book News, September 1998 Abstracted in INSPEC Database.

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