Ceramics Processing in Microtechnology

Contents: Foreword. Overview: Ceramics in micro technology: status, requirements, challenges. Modelling and Design: Design rules for microcomponents; Process simulation with particle methods: micro powder Injection moulding and hot embossing; Finite element modelling of the pressing of ceramic powders to predict the shape of a pellet after die compaction and sintering. Material Development for Micro Technology: Wet chemical synthesis for multinary oxide ceramics; Synthesis of nanoscaled powders for application in microsystem technology; Near net shaping of ceramics in microsystems technology; BST: A perovskite-type ferroelectric for tuneable dielectric applications at radio frequencies; Application of polymer-ceramic composites in microsystem technologies. Process Techniques - Replication: Micro moulds for injection moulding with ceramic feedstocks; High-pressure micro ceramic injection moulding; Low pressure injection moulding; Fabrication of ceramic micro components by electrophoretic deposition. Process Techniques - Thick film Technology: Tape casting in micro- and nanofabrication; LTCC-processing for microsystems application. Process Techniques - Ablating Techniques: Different ceramic materials for micro milling of high-aspect ratio micro structures; High precision micro grooving on ceramic substrates; Pattering and modification of ceramics and glass surfaces; Free form micro processing of ceramic materials by electro-discharge machining. Generating Techniques: Layer manufacturing of ceramic microcomponents; Micro direct writing of ceramics. Quality Assurance: Quality assurance and metrology