Vacuum Mechatronics

By: Steve Belinski

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Paperback | 1 March 2001

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392 Pages

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27.31 x 20.96 x 2.54

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Preface	p. xi
Introduction to Vacuum Mechatronics	p. 1
Vacuum Environment and Applications	p. 11
Vacuum Fundamentals	p. 11
Artificial Vacuum	p. 12
Natural Vacuum	p. 20
Vacuum: Advantages and Disadvantages	p. 21
Applications	p. 22
Reprints
The National Bureau of Standards Primary High-vacuum Standard	p. 25
How to Select High Vacuum Pumps	p. 33
Aluminum Alloy Ultrahigh Vacuum System for Molecular Beam Epitaxy	p. 43
Advances in Vacuum Contamination Control for Electronic Materials Processing	p. 49
Particle Control for Semiconductor Processing in Vacuum Systems	p. 55
Mechanisms of Contaminant Particle Production, Migration and Adhesion	p. 63
Control of Particulate Emissions from Plasma-Etching Systems	p. 69
Vacuum Systems for Microelectronics	p. 75
Manufacturing in a Vacuum Environment	p. 81
Vacuum Mechatronics Fundamentals	p. 87
Materials	p. 87
Lubrication	p. 96
Energy Transfer	p. 105
Reprints
Space Environment and Vacuum Properties of Spacecraft Materials	p. 111
Materials for Ultrahigh Vacuum	p. 119
Analysis of Outgassing Characteristics of Metals	p. 135
Lubricating of Mechanisms for Vacuum Service	p. 139
Considerations of the Lubrication of Spacecraft Mechanisms	p. 145
Contact Heat Transfer-The Last Decade	p. 165
Vacuum Mechatronics Components	p. 179
Actuators	p. 179
Sensors	p. 185
Energy Transmission	p. 189
Machine Elements	p. 193
Magnetic Levitation	p. 196
Reprints
Ultrahigh Vacuum Line Components	p. 203
Ultrahigh Vacuum Leak Sealing with a Silicon Resin Product	p. 215
A Simple Ultrahigh Vacuum Shape Memory Effect Shutter Mechanism	p. 217
Robotic Joint Experiments Under Ultravacuum	p. 219
Vacuum Mechatronics Control	p. 237
Introduction	p. 237
Basic Issues	p. 239
Selected Papers	p. 242
Reprints
Approach to the Dynamically Reconfigurable Robotic Systems	p. 245
The Central Nervous System as a Low and High Level Control System	p. 263
Logical Sensor Systems	p. 281
Vacuum Mechatronic Systems and Applications	p. 307
System Components	p. 307
Applications for Microelectronics	p. 310
Applications for Space	p. 311
Other Applications	p. 312
The Future of Vacuum Mechatronics	p. 313
Reprints
Canadarm and the Space Shuttle	p. 315
Six Mechanisms Used on the SSM/I Radiometer	p. 323
UHV Technique for Intervacuum Sample Transfer	p. 339
Versatile UHV Sample Transfer System	p. 347
Piezodriven Spindle for a Specimen Holder in the Vacuum Chamber of a Scanning Electron Microscope	p. 351
Precision Table for Ultrahigh Vacuum Made of Aluminum Alloys	p. 355
Extended Travel Ultrahigh Vacuum Sample Manipulator with two Orthogonal, Independent Rotations	p. 359
Vacuum Mechatronic Components and Companies	p. 363
Unit Conversion Factors	p. 365
First International Vacuum Mechatronics Workshop	p. 367
Reprint Acknowledgements	p. 369
Index	p. 373
Table of Contents provided by Syndetics. All Rights Reserved.

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