Springer Materials Science

Modeling and Simulations

By: Toh-Ming Lu, Matthew Pelliccione

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Hardcover | 30 November 2007

At a Glance

Hardcover
220 Pages

Dimensions(cm)
24.77 x 16.51 x 1.91

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Thin?lmdepositionisthemostubiquitousandcriticaloftheprocessesusedto manufacture high-tech devices such as microprocessors, memories, solar cells, microelectromechanicalsystems(MEMS), lasers, solid-statelighting, andp- tovoltaics. The morphology and microstructure of thin ?lms directly controls their optical, magnetic, and electrical properties, which are often signi?cantly di?erent from bulk material properties. Precise control of morphology and microstructure during thin ?lm growth is paramount to producing the - sired ?lm quality for speci?c applications. To date, many thin ?lm deposition techniques have been employed for manufacturing ?lms, including thermal evaporation, sputterdeposition, chemicalvapordeposition, laserablation, and electrochemical deposition. The growth of ?lms using these techniques often occurs under highly n- equilibrium conditions (sometimes referred to as far-from-equilibrium), which leads to a rough surface morphology and a complex temporal evolution. As atoms are deposited on a surface, atoms do not arrive at the surface at the same time uniformly across the surface. This random ?uctuation, or noise, which is inherent to the deposition process, may create surface growth front roughness. The noise competes with surface smoothing processes, such as surface di?usion, to form a rough morphology if the experiment is performed at a su?ciently low temperature and / or at a high growth rate. In addition, growth front roughness can also be enhanced by growth processes such as geometrical shadowing. Due to the nature of the deposition process, atoms approaching the surface do not always approach in parallel; very often atoms arrive at the surface with an angular distribution.

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You Can Find This Book In

Non-Fiction Engineering & Technology Mechanical Engineering & Materials Materials Science Other Technologies & Applied Sciences Applied Optics Electronics & Communications Engineering Electronics Engineering Electronic Devices & Materials Semi-Conductors & Super-Conductors Technology in General Nanotechnology

Mechanical Engineering Tribology including Friction & Lubrication Science Chemistry Inorganic Chemistry

Introduction	p. 1
Description of Thin Film Morphology
Surface Statistics	p. 13
Self-Affine Surfaces	p. 29
Mounded Surfaces	p. 47
Continuum Surface Growth Models
Stochastic Growth Equations	p. 61
Small World Growth Model	p. 79
Discrete Surface Growth Models
Monte Carlo Simulations	p. 93
Solid-on-Solid Models	p. 101
Ballistic Aggregation Models	p. 121
Concluding Remarks	p. 143
Mathematical Appendix	p. 145
Euler's Method Implementation	p. 173
Small World Model Implementation	p. 179
Solid-on-Solid Model Implementation	p. 185
References	p. 191
Symbols	p. 201
Index	p. 203
Table of Contents provided by Blackwell. All Rights Reserved.

Springer Materials Science

Modeling and Simulations

At a Glance

Hardcover

Shipping

How to return your order

Defective items

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