| Micro-Fabrication of Gas Sensors | p. 1 |
| Introduction | p. 1 |
| Gas Sensors and MEMS Miniaturization Techniques | p. 3 |
| Silicon as a Sensor Material | p. 3 |
| Thermal Sensors and Actuators | p. 4 |
| Thermal Microstructures | p. 6 |
| Specific Sensor Examples | p. 11 |
| Heat Conductivity Sensors | p. 12 |
| Metal-Oxide-Based Gas Sensors | p. 16 |
| Field-Effect Gas Sensors | p. 19 |
| Thermal Infrared Emitters | p. 21 |
| Gas-Sensing Microsystems | p. 22 |
| Low False-Alarm-Rate Fire Detection | p. 23 |
| Air Quality Monitoring and Leak Detection | p. 27 |
| Industrialization Issues | p. 34 |
| Initiating a System-Level Innovation | p. 34 |
| Building Added-Value Lines | p. 34 |
| Mastering the MEMS Challenge | p. 36 |
| Cooperation Across Technical and Economic Interfaces | p. 37 |
| Creating Higher Added Value | p. 40 |
| Conclusions and Outlook | p. 40 |
| References | p. 41 |
| Electrical-Based Gas Sensing | p. 47 |
| Introduction | p. 47 |
| Metal Oxide Semiconductor Surfaces | p. 49 |
| Geometric Structures | p. 49 |
| Electronic Structures | p. 50 |
| Electrical Properties of Metal Oxide Semiconductor Surfaces | p. 50 |
| Semiconductor Statistics | p. 50 |
| Surface States | p. 52 |
| Surface Space Charge Region | p. 54 |
| Surface Dipoles | p. 57 |
| Conduction Models of Metal Oxides Semiconductor | p. 58 |
| Polycrystalline Materials with Large Grains | p. 60 |
| Polycrystalline Materials with Small Grains | p. 61 |
| Mono-crystalline Materials | p. 63 |
| Adsorption over Metal Oxide Semiconductor Surfaces | p. 65 |
| Physical and Chemical Adsorption | p. 65 |
| Surface Reactions Towards Electrical Properties | p. 67 |
| Catalysts and Promoters | p. 69 |
| Deposition Techniques | p. 70 |
| Three-Dimensional Nanostructures | p. 70 |
| Two-Dimensional Nanostructures | p. 71 |
| One-Dimensional Materials | p. 80 |
| Conductometric Sensor Fabrication | p. 84 |
| Substrate and Heater | p. 84 |
| Electrical Contacts | p. 88 |
| Heating Treatments | p. 89 |
| Dopings, Catalysts and Filters | p. 90 |
| Transduction Principles and Related Novel Devices | p. 92 |
| DC Resistance | p. 92 |
| AC Impedance | p. 94 |
| Response Photoactivation | p. 95 |
| Conclusions and Outlook | p. 99 |
| References | p. 99 |
| Capacitive-Type Relative Humidity Sensor with Hydrophobic Polymer Films | p. 109 |
| Introduction | p. 109 |
| Fundamental Aspects | p. 110 |
| Sorption Isotherms of Polymers | p. 110 |
| Water Sorption Behavior of Polymers | p. 111 |
| Effects of the Sorbed Water on the Dielectric Properties | p. 111 |
| Characterization of Polymers | p. 113 |
| Sorption Isotherms | p. 113 |
| FT-IR Measurement | p. 115 |
| Solvatochromism | p. 117 |
| Capacitance Changes with Water Sorption | p. 120 |
| Cross-Linked Polymer | p. 124 |
| Humidity-Sensors-Based Hydrophobic Polymer Thin Films | p. 130 |
| Poly-Methylmethacrylate-Based Humidity Sensor | p. 131 |
| Characteristics of Cross-Linked PMMA-Based Sensor | p. 133 |
| Polysulfone-based Sensor | p. 136 |
| Acetylene-Terminated Polyimide-based Sensor | p. 138 |
| Cross-Lined Fluorinated Polyimide-Based Sensor | p. 143 |
| Improvements Using MEMS Technology | p. 145 |
| References | p. 149 |
| FET Gas-Sensing Mechanism, Experimental and Theoretical Studies | p. 153 |
| Introduction | p. 153 |
| Brief Summary of the Detection Mechanism of FET Devices | p. 154 |
| UHV Studies of FET Surface Reactions | p. 157 |
| TEM and SEM Studies of the Nanostructure of FET Sensing Layers | p. 160 |
| Mass Spectrometry for Atmospheric Pressure Studies | p. 161 |
| The Scanning Light Pulse Technology | p. 162 |
| DRIFT Spectroscopy for In Situ Studies of Adsorbates | p. 163 |
| Atomistic Modelling of Chemical Reactions on FET Sensor Surfaces | p. 168 |
| Nanoparticles as Sensing Layers in FET Devices | p. 171 |
| Summary and Outlook | p. 173 |
| References | p. 174 |
| Solid-State Electrochemical Gas Sensing | p. 181 |
| Introduction | p. 181 |
| Mixed-Potential-Type Sensors | p. 185 |
| High-Temperature-Type NOx Sensors | p. 185 |
| Improvement in NO[subscript 2] Sensitivity by Additives | p. 189 |
| Hydrocarbon (C[subscript 3]H[subscript 6] or CH[subscript 4]) Sensors | p. 191 |
| Use of Nanostructured NiO-Based Materials | p. 192 |
| Nanosized Au Thin-Layer for Sensing Electrode | p. 196 |
| Amperometric Sensors | p. 198 |
| Impedancemetric Sensors | p. 200 |
| Sensing of Various Gases in ppm Level | p. 200 |
| Environmental Monitoring of C[subscript 3]H[subscript 6] in ppb Level | p. 201 |
| Solid-State Reference Electrode | p. 204 |
| Conclusions and Future Prospective | p. 205 |
| References | p. 206 |
| Optical Gas Sensing | p. 209 |
| Introduction | p. 209 |
| Spectroscopic Detection Schemes | p. 210 |
| Ellipsometry | p. 213 |
| Surface Plasmon Resonance | p. 216 |
| Guided-Wave Configurations for Gas Sensing | p. 221 |
| Integrated Optical SPR Sensors | p. 223 |
| Fiber Optic SPR Sensors | p. 223 |
| Conventional and Microstructured Fibers for Gas Sensing | p. 225 |
| Conclusions | p. 229 |
| References | p. 231 |
| Thermometric Gas Sensing | p. 237 |
| Detection of Combustible Gases | p. 237 |
| Combustion | p. 237 |
| Thermal Considerations during Combustion | p. 238 |
| Catalysis | p. 239 |
| Explosive Mixtures | p. 240 |
| Catalytic Sensing | p. 241 |
| Pellistors | p. 242 |
| Microcalorimeters in Enzymatic Reactions | p. 248 |
| Thermal Conductivity Sensors | p. 249 |
| Calorimetric Sensors Measuring Adsorption/Desorption Enthalpy | p. 251 |
| MEMS and Silicon Components | p. 251 |
| Thermal Considerations | p. 252 |
| Temperature Readout | p. 254 |
| Integrated Calorimetric Sensors | p. 256 |
| Sensor Arrays and Electronic Noses | p. 257 |
| References | p. 259 |
| Acoustic Wave Gas and Vapor Sensors | p. 261 |
| Introduction | p. 261 |
| Acoustic Waves in Elastic Media | p. 263 |
| Advantages of Acoustic-Wave-Based Gas-Phase Sensors | p. 266 |
| Thickness Shear Mode (TSM)-Based Gas Sensors | p. 267 |
| Quartz Crystal Microbalance (QCM)-Based Gas Sensors | p. 268 |
| Thin-Film Resonator (TFR)-Based Gas Sensors | p. 276 |
| Surface Acoustic Wave (SAW)-Based Gas Sensors | p. 282 |
| Conventional SAW Gas Sensors | p. 285 |
| Multi-Layered SAW Gas Sensors | p. 286 |
| Gas and Vapor Sensitivity | p. 286 |
| SAW Device Gas Sensor Performance | p. 291 |
| Concluding Remarks | p. 296 |
| References | p. 296 |
| Cantilever-Based Gas Sensing | p. 305 |
| Introduction to Microcantilever-Based Sensing | p. 305 |
| Early Approaches to Mechanical Sensing | p. 305 |
| Cantilever Sensors | p. 306 |
| Deflection Measurement | p. 307 |
| Modes of Operation | p. 310 |
| Static Mode | p. 310 |
| Dynamic Mode | p. 311 |
| Functionalization | p. 312 |
| Example of an Optical Beam-Deflection Setup | p. 313 |
| General Description | p. 313 |
| Cantilever-Based Electronic Nose Application | p. 314 |
| Applications of Cantilever-Based Gas Sensors | p. 316 |
| Gas Sensing | p. 316 |
| Chemical Vapor Detection | p. 318 |
| Explosives Detection | p. 319 |
| Gas Pressure and Flow Sensing | p. 321 |
| Other Techniques | p. 322 |
| Metal Oxide Gas Sensors | p. 322 |
| Quartz Crystal Microbalance | p. 323 |
| Conducting Polymer Sensors | p. 323 |
| Surface Acoustic Waves | p. 323 |
| Field Effect Transistor Sensors Devices | p. 324 |
| References | p. 325 |
| Index | p. 329 |
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