Solid State Gas Sensing

By: Elisabetta Comini (Editor), Guido Faglia (Editor), Giorgio Sberveglieri (Editor)

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Hardcover | 9 October 2008

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Hardcover
356 Pages

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23.5 x 16.51 x 2.54

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Solid State Gas Sensing offers insight into the principles, applications, and new trends in gas sensor technology. Developments in this field are rapidly advancing due to the recent and continuing impact of nanotechnology, and this book addresses the demand for small, reliable, inexpensive and portable systems for monitoring environmental concerns, indoor air quality, food quality, and many other specific applications. Working principles, including electrical, permittivity, field effect, electrochemical, optical, thermometric and mass (both quartz and cantilever types), are discussed, making the book valuable and accessible to a variety of researchers and engineers in the field of material science.

Industry Reviews

From the reviews: "This book offers insight into the principles, applications and new trends in gas sensor technology. Developments in this area are rapidly advancing, so the timing of this book's publication is perfect. It covers sensors based on many different approaches, making it useful to a wide variety of people." (Hsuing Hsu, Optics & Photonics News, February, 2010)

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Micro-Fabrication of Gas Sensors	p. 1
Introduction	p. 1
Gas Sensors and MEMS Miniaturization Techniques	p. 3
Silicon as a Sensor Material	p. 3
Thermal Sensors and Actuators	p. 4
Thermal Microstructures	p. 6
Specific Sensor Examples	p. 11
Heat Conductivity Sensors	p. 12
Metal-Oxide-Based Gas Sensors	p. 16
Field-Effect Gas Sensors	p. 19
Thermal Infrared Emitters	p. 21
Gas-Sensing Microsystems	p. 22
Low False-Alarm-Rate Fire Detection	p. 23
Air Quality Monitoring and Leak Detection	p. 27
Industrialization Issues	p. 34
Initiating a System-Level Innovation	p. 34
Building Added-Value Lines	p. 34
Mastering the MEMS Challenge	p. 36
Cooperation Across Technical and Economic Interfaces	p. 37
Creating Higher Added Value	p. 40
Conclusions and Outlook	p. 40
References	p. 41
Electrical-Based Gas Sensing	p. 47
Introduction	p. 47
Metal Oxide Semiconductor Surfaces	p. 49
Geometric Structures	p. 49
Electronic Structures	p. 50
Electrical Properties of Metal Oxide Semiconductor Surfaces	p. 50
Semiconductor Statistics	p. 50
Surface States	p. 52
Surface Space Charge Region	p. 54
Surface Dipoles	p. 57
Conduction Models of Metal Oxides Semiconductor	p. 58
Polycrystalline Materials with Large Grains	p. 60
Polycrystalline Materials with Small Grains	p. 61
Mono-crystalline Materials	p. 63
Adsorption over Metal Oxide Semiconductor Surfaces	p. 65
Physical and Chemical Adsorption	p. 65
Surface Reactions Towards Electrical Properties	p. 67
Catalysts and Promoters	p. 69
Deposition Techniques	p. 70
Three-Dimensional Nanostructures	p. 70
Two-Dimensional Nanostructures	p. 71
One-Dimensional Materials	p. 80
Conductometric Sensor Fabrication	p. 84
Substrate and Heater	p. 84
Electrical Contacts	p. 88
Heating Treatments	p. 89
Dopings, Catalysts and Filters	p. 90
Transduction Principles and Related Novel Devices	p. 92
DC Resistance	p. 92
AC Impedance	p. 94
Response Photoactivation	p. 95
Conclusions and Outlook	p. 99
References	p. 99
Capacitive-Type Relative Humidity Sensor with Hydrophobic Polymer Films	p. 109
Introduction	p. 109
Fundamental Aspects	p. 110
Sorption Isotherms of Polymers	p. 110
Water Sorption Behavior of Polymers	p. 111
Effects of the Sorbed Water on the Dielectric Properties	p. 111
Characterization of Polymers	p. 113
Sorption Isotherms	p. 113
FT-IR Measurement	p. 115
Solvatochromism	p. 117
Capacitance Changes with Water Sorption	p. 120
Cross-Linked Polymer	p. 124
Humidity-Sensors-Based Hydrophobic Polymer Thin Films	p. 130
Poly-Methylmethacrylate-Based Humidity Sensor	p. 131
Characteristics of Cross-Linked PMMA-Based Sensor	p. 133
Polysulfone-based Sensor	p. 136
Acetylene-Terminated Polyimide-based Sensor	p. 138
Cross-Lined Fluorinated Polyimide-Based Sensor	p. 143
Improvements Using MEMS Technology	p. 145
References	p. 149
FET Gas-Sensing Mechanism, Experimental and Theoretical Studies	p. 153
Introduction	p. 153
Brief Summary of the Detection Mechanism of FET Devices	p. 154
UHV Studies of FET Surface Reactions	p. 157
TEM and SEM Studies of the Nanostructure of FET Sensing Layers	p. 160
Mass Spectrometry for Atmospheric Pressure Studies	p. 161
The Scanning Light Pulse Technology	p. 162
DRIFT Spectroscopy for In Situ Studies of Adsorbates	p. 163
Atomistic Modelling of Chemical Reactions on FET Sensor Surfaces	p. 168
Nanoparticles as Sensing Layers in FET Devices	p. 171
Summary and Outlook	p. 173
References	p. 174
Solid-State Electrochemical Gas Sensing	p. 181
Introduction	p. 181
Mixed-Potential-Type Sensors	p. 185
High-Temperature-Type NOx Sensors	p. 185
Improvement in NO[subscript 2] Sensitivity by Additives	p. 189
Hydrocarbon (C[subscript 3]H[subscript 6] or CH[subscript 4]) Sensors	p. 191
Use of Nanostructured NiO-Based Materials	p. 192
Nanosized Au Thin-Layer for Sensing Electrode	p. 196
Amperometric Sensors	p. 198
Impedancemetric Sensors	p. 200
Sensing of Various Gases in ppm Level	p. 200
Environmental Monitoring of C[subscript 3]H[subscript 6] in ppb Level	p. 201
Solid-State Reference Electrode	p. 204
Conclusions and Future Prospective	p. 205
References	p. 206
Optical Gas Sensing	p. 209
Introduction	p. 209
Spectroscopic Detection Schemes	p. 210
Ellipsometry	p. 213
Surface Plasmon Resonance	p. 216
Guided-Wave Configurations for Gas Sensing	p. 221
Integrated Optical SPR Sensors	p. 223
Fiber Optic SPR Sensors	p. 223
Conventional and Microstructured Fibers for Gas Sensing	p. 225
Conclusions	p. 229
References	p. 231
Thermometric Gas Sensing	p. 237
Detection of Combustible Gases	p. 237
Combustion	p. 237
Thermal Considerations during Combustion	p. 238
Catalysis	p. 239
Explosive Mixtures	p. 240
Catalytic Sensing	p. 241
Pellistors	p. 242
Microcalorimeters in Enzymatic Reactions	p. 248
Thermal Conductivity Sensors	p. 249
Calorimetric Sensors Measuring Adsorption/Desorption Enthalpy	p. 251
MEMS and Silicon Components	p. 251
Thermal Considerations	p. 252
Temperature Readout	p. 254
Integrated Calorimetric Sensors	p. 256
Sensor Arrays and Electronic Noses	p. 257
References	p. 259
Acoustic Wave Gas and Vapor Sensors	p. 261
Introduction	p. 261
Acoustic Waves in Elastic Media	p. 263
Advantages of Acoustic-Wave-Based Gas-Phase Sensors	p. 266
Thickness Shear Mode (TSM)-Based Gas Sensors	p. 267
Quartz Crystal Microbalance (QCM)-Based Gas Sensors	p. 268
Thin-Film Resonator (TFR)-Based Gas Sensors	p. 276
Surface Acoustic Wave (SAW)-Based Gas Sensors	p. 282
Conventional SAW Gas Sensors	p. 285
Multi-Layered SAW Gas Sensors	p. 286
Gas and Vapor Sensitivity	p. 286
SAW Device Gas Sensor Performance	p. 291
Concluding Remarks	p. 296
References	p. 296
Cantilever-Based Gas Sensing	p. 305
Introduction to Microcantilever-Based Sensing	p. 305
Early Approaches to Mechanical Sensing	p. 305
Cantilever Sensors	p. 306
Deflection Measurement	p. 307
Modes of Operation	p. 310
Static Mode	p. 310
Dynamic Mode	p. 311
Functionalization	p. 312
Example of an Optical Beam-Deflection Setup	p. 313
General Description	p. 313
Cantilever-Based Electronic Nose Application	p. 314
Applications of Cantilever-Based Gas Sensors	p. 316
Gas Sensing	p. 316
Chemical Vapor Detection	p. 318
Explosives Detection	p. 319
Gas Pressure and Flow Sensing	p. 321
Other Techniques	p. 322
Metal Oxide Gas Sensors	p. 322
Quartz Crystal Microbalance	p. 323
Conducting Polymer Sensors	p. 323
Surface Acoustic Waves	p. 323
Field Effect Transistor Sensors Devices	p. 324
References	p. 325
Index	p. 329
Table of Contents provided by Ingram. All Rights Reserved.

Solid State Gas Sensing

At a Glance

Hardcover

Industry Reviews

Shipping

How to return your order

Defective items

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