Smart MEMS and Sensor Systems

By: Elena Gaura, Robert Newman

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Hardcover | 14 August 2006

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Hardcover
552 Pages

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23.3 x 15.9 x 3.3

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In recent years, MEMS have revolutionized the semiconductor industry, with sensors being a particularly buoyant sector. Smart MEMS and Sensor Systems presents readers with the means to understand, evaluate, appreciate and participate in the development of the field, from a unique systems perspective.The combination of MEMS and integrated intelligence has been put forward as a disruptive technology. The full potential of this technology is only evident when it is used to construct very large pervasive sensing systems. The book explores the many different technologies needed to build such systems and integrates knowledge from three different domains: MEMS technology, sensor system electronics and pervasive computing science.Throughout the book a top-down design perspective is taken, be it for the development of a single smart sensor or that of adaptive ad-hoc networks of millions of sensors.For experts in any of the domains named above the book provides the context for their MEMS based design work and an understanding of the role the other domains play. For the generalist (either in engineering or computing) or the technology manager the underpinning knowledge is provided, which can inform specialist decision making.

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Non-Fiction Engineering & Technology Electronics & Communications Engineering Electronics Engineering Electronic Devices & Materials Communications Engineering & Telecommunications Energy Technology & Engineering Electrical Engineering Technology in General Nanotechnology Booktopia Publisher Services World Scientific Publishing

Preface	p. v
Markets and Applications	p. 1
Technology at Crossroads	p. 1
The Present - MEMS in the News	p. 2
The Past - Great Expectations	p. 7
The Future - Maturity and Pervasive Applications	p. 10
Drivers for Progress	p. 13
Progress - Device Improvement	p. 15
Progress - Device Integration	p. 18
Smart MEMS - The Research Agenda	p. 23
Structure of the Book	p. 26
Microfabrication Technologies	p. 31
Introduction	p. 31
Passive Components	p. 36
Sensing Components	p. 42
Actuating Components	p. 49
Materials and Growth	p. 55
Fabrication Techniques	p. 73
Conclusions	p. 97
Sensor Electronics	p. 107
Introduction	p. 107
Functions of a Sensor System	p. 108
Analogue and Digital Design Options	p. 131
Digital Signal Processing	p. 137
Interface Configurations for Different Transducer Types	p. 143
Integration	p. 152
Design for Power Awareness	p. 158
Conclusion	p. 168
Sensor Signal Enhancement	p. 173
Errors in Sensor Systems and Measurement Quality (Non-linearity, Cross-sensitivity, Offset, Parameter Drift)	p. 174
Sensor Calibration and Compensation - Techniques and Examples	p. 187
System Design Choices for Compensation - Closed Loop Configurations and other Designs	p. 225
Summing up on Sensor Calibration and Compensation	p. 226
Case Study: Control Systems for Capacitive Inertial Sensors	p. 233
Introduction	p. 233
Open Loop Accelerometer	p. 235
Closed Loop Accelerometer	p. 243
Conclusions	p. 268
Case Study: Adaptive Optics and Smart VLSI/MEMS Systems	p. 273
Introduction	p. 273
Adaptive Optics and MEMS Systems	p. 274
Operational Principles	p. 276
Device Implementation	p. 283
Closed-loop Adaptive Optical System	p. 294
Conclusions and Future Trends	p. 299
Artificial Intelligence Techniques for Microsensors Identification and Compensation	p. 305
Artificial Neural Networks: What They are and How They are Used for Microsensor Control and Identification	p. 305
Open Loop, Neural Transducer Prototype for Static/Low Frequency Applications	p. 315
Closed-loop Neural Network Controlled Accelerometer	p. 331
The Neural Network Non-linear Gain Controller	p. 337
Micromachined Sensor Identification Using Neural Networks	p. 348
Concluding Remarks	p. 364
Smart, Intelligent and Cogent MEMS Based Sensors	p. 369
Introduction	p. 369
Smart, Intelligent and Cogent Sensors - What do the Terms Mean	p. 370
What and Where is the Added Value Brought by Intelligence?	p. 379
ANNs and MEMS	p. 382
AI for MEMS Intelligence	p. 390
'Cogent' Sensors - Fault Detection Case Study	p. 403
Conclusion	p. 412
Sensor Arrays and Networks	p. 417
Potential of Sensor Arrays	p. 417
Node Design	p. 420
An Architectural History of Sensor Arrays and Networks	p. 425
Systems Design Issues	p. 440
Network Technology and Topology	p. 443
Conclusion	p. 458
Wireless and Ad Hoc Sensor Networks	p. 465
Sensor Network Applications	p. 466
System Designers' Role	p. 472
Design Assumptions for Ad hoc Networks	p. 475
Distributed System Design Philosophy	p. 477
Network Design Considerations	p. 481
Layered Model	p. 485
Sensor Network Operating Environments	p. 488
Application Services	p. 498
Proposed Sensor Support System Architecture	p. 501
Conclusions	p. 504
Realising the Dream - A Case Study	p. 509
Introduction	p. 509
The Mission	p. 510
Initial Rough Design	p. 513
Sensor Technology	p. 518
Deployment	p. 523
Operation, Control and Communication	p. 525
Querying the Array	p. 526
A Cogent Sensor	p. 527
A World of Applications	p. 530
Index	p. 533
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Smart MEMS and Sensor Systems

At a Glance

Hardcover

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