Silicon Molecular Beam Epitaxy

Name: Silicon Molecular Beam Epitaxy
Brand: Taylor & Francis Ltd
Price: 359.75 AUD
Availability: BackOrder

Volume II

By: E. Kasper

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Hardcover | 14 December 2017 | Edition Number 1

At a Glance

Hardcover
306 Pages

Dimensions(cm)
25.4 x 17.8

Hardcover

RRP $420.00

$359.75

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This subject is divided into two volumes. Volume I is on homoepitaxy with the necessary systems, techniques, and models for growth and dopant incorporation. Three chapters on homoepitaxy are followed by two chapters describing the different ways in which MBE may be applied to create insulator/Si stackings which may be used for three-dimensional circuits. The two remaining chapters in Volume I are devoted to device applications. The first three chapters of Volume II treat all aspects of heteroepitaxy with the exception of the epitaxial insulator/Si structures already treated in volume I.

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