Astrophysics and Space Science Library

Proceedings of the Sensor Technology Conference 2001, held in Enschede, The Netherlands 14-15 May, 2001

By: Miko Elwenspoek (Editor)

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Hardcover | 31 May 2001

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216 Pages

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The 2001 Dutch Sensor Conference held on 14 -15 May 2001, at the University of Twente in Enschede, The Netherlands, is the fourth in a series ofmeetings. The conference is initiated by the Dutch Technology Foundation (STW) in order to stimulate the industrial application ofsensor research. This MESA Monograph contains a collection oflatest research and development from all major Dutch centers ofsensor research and aspect ofsensor commercialization. Thus it provides an excellent overview ofthe state ofthe art ofDutch Sensor Technology in the new millennium. I should like to acknowledge the work ofthe program committee, the local organizing committee and, ofcourse, the contributors to this volume. All ofthem made the conference a success. Prof. Dr. Miko Elwenspoek Conference Chairman Program Committee: M. Elwenspoek (Chairman) (MESA+) A.van den Berg (MESA+) PJ. French (TV Delft) P.V. Lambeck (MESA+) H. Leeuwis (3T) J.c. Lotters (Bronkhorst) HAC. Tilmans (IMEC) Contents MEASUREMENT SYSTEM FOR BIOCHEMICAL ANALYSIS BASED 1 ON CAPILLARY ELECTROPHORESIS AND MICROSCALE CONDUCTIVITY DETECTION F. Laugere, A. Berthold, R.M Guijt, E. Baltussen, J. Bastemeijer, P.M Sarro, MJ. Vellekoop ELECTRO-OSMOTIC FLOW CONTROL IN MICROFLUIDICS 7 SYSTEMS R.E. Oosterbroek,MH. Goedbloed, A. Trautmann, N.J. van der Veen, S Schlautmann, 1.W Berenschot, A. van den Berg FLOW SENSING USING THE TEMPERATURE DISTRIBUTION 13 ALONG A HEATED MICROBEAM J.J. van Baar, RJ Wiegerink,GJM Krijnen, T.SJ. Lammerink, M.C.

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Measurement System for Biochemical Analysis Based on Capillary Electrophoresis and Microscale Conductivity Detection	p. 1
Electro-Osmotic Flow Control in Microfluidics Systems	p. 7
Flow Sensing Using the Temperature Distribution Along a Heated Microbeam	p. 13
Temperature-Balance Micro Flow Sensor System Based on a Free Oscillating Differential Power Controller	p. 19
Technology for Spatial Light Modulators Based on Reflective Silicon Structures	p. 25
Building of a Highly Sensitive Two-Channel Integrated Optical Young Interferometer as the First Step Towards Constructing an Integrated Multichannel Interferometer Immunosensor	p. 31
High Speed Integrated Cmos Wavefront Sensor	p. 37
Automotive Sensor Development: Success Guaranteed?	p. 43
Study on the Behaviour of Various Si Substrate Geometries for use as Passive Heat Sink	p. 47
Transfer Mould Packaging for Sensors	p. 53
Inexpensive Mems Packaging	p. 59
Low-Cost System to Determine the X-Y Position in a Resistive Touch-Screen	p. 65
High Capacity Silicon Load Cells	p. 71
Thermopile Design for a Cmos Wind-Sensor	p. 77
Investigation of Relative Humidity Sensors Based on Porous Silicon, Porous Polysilicon and Porous Silicon Carbide	p. 83
Limitations and Complementary Value of Cryogenic SF6-O2 and Bosch Plasma Etch Process for Silicon Micromachining	p. 89
Fabrication of Mechanical Structures Using Macroporous Silicon	p. 95
Fine Tuning the Surface Roughness of Powder Blasted Glass Surfaces	p. 101
On the Feasibility of Using Antifuses as Low-Power Heating/Detecting Elements in Pellistor-Type Gas Sensors	p. 107
Amperometric Sensor for Detection of Redox Activity	p. 113
Accurate Quantitative Measurement of E-Field Distributions in "Solid" Phantoms Using a Flexible Schottky Diode Sheet	p. 119
A Simple Selfpriming Bubble-Tolerant Peristaltic Micropump	p. 125
Hf Etching of Si-Oxides and Si-Nitrides for Surface Micromachining	p. 131
A Light Absorption Cell for [mu]-Tas with Koh/Ipa Etched 45[degree] Mirrors in Silicon	p. 137
A Low-Cost and Accurate Conductance-Measurement System	p. 143
An Improved Sensor-Actuator System for Dynamic Surface Tension Measurements	p. 149
DNA Condensation Caused by Ligand Binding May Serve as a Sensor	p. 155
Forming a Rounded Convex Corner by Using Two-Step Anisotropic Koh Wet Etching	p. 161
An Accurate Measurement System for Thermopiles	p. 167
Packaged Stainless Steel Flowsensor	p. 173
Micro-Machining of a Cryogenic Imaging Array of Transition Edge X-Ray Microcalorimeters	p. 179
Enzyme Immobilisation Studies for Sensor Applications	p. 185
Micromachined Si-Well Scintillator Pixel Sensors for Thermal Neutron Detection	p. 191
Author Index	p. 197
Subject Index	p. 199
Table of Contents provided by Syndetics. All Rights Reserved.

Astrophysics and Space Science Library

Proceedings of the Sensor Technology Conference 2001, held in Enschede, The Netherlands 14-15 May, 2001

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