Robotics for Electronics Manufacturing : Principles and Applications in Cleanroom Automation - Karl Mathia

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Robotics for Electronics Manufacturing

Principles and Applications in Cleanroom Automation

By: Karl Mathia

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Hardcover | 6 May 2010

At a Glance

Hardcover
250 Pages

Dimensions(cm)
26.04 x 18.42 x 1.91

Hardcover

RRP $263.95

$229.75

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"I have never come across a single book that explains the history, design, and use of cleanroom robotics for electronics manufacturing so thoroughly. This is a must read for anyone designing cleanroom equipment for electronics manufacturing!" Jeff Baird, Director of Engineering, Adept Technology, inc

"A must read for anyone working on semiconductor or flat panel robotics. This book captures theory, applications, and best practices." Dr. Martin P. Aalund, Director NPI Engineering, KLA-Tencor Corp.

"The definitive reference for cleanroom robotics, as well as a practical guide for anyone who wishes to go beyond theory to the economic justifications and real-world commercial requirements to deploy robot technology." Dr. Rich Mahoney, Director of Robotics, Engineering & Systems Division, SRI International

From the history and evolution of cleanroom automation to the latest applications and industry standards, this book provides the only available complete overview of robotics for electronics manufacturing. Numerous real-world examples enable you to learn from professional experience, maximize the design quality, and avoid expensive design pitfalls. You'll also get design guidelines and hands-on tips for reducing design time and cost, Compliance with industry and de-facto standards for design, assembly, and handling is stressed throughout, and detailed discussions of recommended materials for atmospheric and vacuum robots are included to help shorten product development cycles and avoid expensive material testing.

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You Can Find This Book In

Non-Fiction Engineering & Technology Electronics & Communications Engineering Electronics Engineering Automatic Control Engineering Robotics Mechanical Engineering & Materials Mechanical Engineering Industrial Chemistry & Manufacturing Technologies Production & Industrial Engineering Reliability Engineering

Preface	p. xi
Industrial robotics	p. 1
History of industrial robotics	p. 1
The global robotics industry	p. 2
Applications and operational stock by region	p. 5
Socioeconomic impact	p. 6
Definitions, standards, and terminology	p. 7
Applicable and related standards	p. 11
Cleanroom robotics	p. 12
Manufacturing in cleanroom environments	p. 12
Semiconductor manufacturing	p. 14
Flat panel display manufacturing	p. 20
Substrate-handling, robots	p. 23
Applicable and related standards	p. 28
Design of atmospheric robots	p. 30
Clean materials	p. 30
Prevention of electrostatic charge	p. 37
Surface finishes for cleanroom robotics	p. 43
Clean drive trains	p. 48
Arm compliance	p. 53
End-effectors	p. 60
Robot assembly and handling	p. 62
Applicable and related standards	p. 70
Design of vacuum robots	p. 73
Robotics challenges in vacuum environments	p. 73
What is vacuum?	p. 74
Static vacuum barrier	p. 76
Dynamic vacuum barrier	p. 79
Clean drive trains	p. 92
External and internal leaks	p. 99
Materials and surface finishes	p. 104
Assembly and installation of vacuum robots	p. 115
Applicable and related standards	p. 120
Kinematics	p. 124
Joint space, operational space, and workspace	p. 124
Kinematic robot structures	p. 126
Mathematical foundations	p. 129
Forward kinematics	p. 134
Inverse kinematics	p. 149
Commercial substrate-handling robots	p. 150
Applicable and related standards	p. 153
Dynamics and control	p. 154
Manipulator dynamics	p. 154
Robot motion control	p. 162
Networked, decentralized robot control	p. 172
Applicable and related standards	p. 177
Test and characterization	p. 179
Airborne particle contamination	p. 179
Surface particle contamination	p. 182
Positioning accuracy and repeatability	p. 186
Path accuracy and repeatability	p. 199
Vibration analysis	p. 206
Mechanical axis decoupling	p. 212
Applicable and related standards	p. 218
SI units and conversion tables	p. 220
Standards organizations	p. 223
Standard temperature and pressure (STP)	p. 225
References	p. 226
Index	p. 232
Table of Contents provided by Ingram. All Rights Reserved.

Robotics for Electronics Manufacturing

Principles and Applications in Cleanroom Automation

At a Glance

Hardcover

Shipping

How to return your order

Defective items

You Can Find This Book In

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