Progress in Precision Engineering

1 Ultra-Precision Displacement Metrology.- Investigation and Compensation of the Non-linearity of Heterodyne Interferometers.- Technology and Application of Grating Interferometers in High-precision Measurement.- Silicon as a Length- and Angle Ruler in Nanotechnology.- 2 High-Precision Sensor Systems.- Electron Tunnel Sensors.- Diode Lasers for Industrial Length Meassurements.- 3 Three-Dimensional Metrology.- Paving the Way to Thermally Stable Coordinate Measuring Machines.- Towards Quadrilateration using Steel Ball Retroreflectors.- Testing of Algorithms for Coordinate Measuring Machines.- 4 High-Precision Machine Design and Manufacture.- Experiences in the Development of Ultra Stiff CNC Aspheric Generating Machine Tools for Ductile Regime Grinding of Brittle Materials.- Development of High-precision Aspheric Grinding/Turning Machine.- Design and Testing of a Self Coupling Hydrostatic Leadscrew.- 5 Techniques and Equipment for Machine Performance Testing.- Application of Contisure for the Verification of the Contouring Performance of Precision Machines.- An Evaluation of Ultra-precise Machine Tool Contouring Performance: The Low Amplitude Sine Tracking (LAST) Test.- Examination of High Precision Slow-motion Feed-drive Systems for the Sub-micrometre Range.- 6 High-Precision Machining Processes and Materials.- The Influence of the Crystallographic Structure of the Substrate Material on Surface Quality and Cutting Forces in Micromachining.- Mirror Surface Grinding by Metal Bonded Super-abrasive Wheel with Electrolytic In-process Dressing.- Result of Non-linear Mixing in Precision Machining.- 7 Machine and Process Control.- Micropositioning for Submicron Electron Beam Lithography.- Refinements in Postprocess Gaging with Feedback in the Production of Diamond Turned Optics.- 8 Non-Conventional Processes for Industrial Applications.- Evaluation of Silicon Wafer Polishing Pads - Rheological Behaviour of Polishing Pads and Improvement of Wafer Flatness.- High Aspect Ratio Laser Machining of Composite Ceramics.- Particle Beam Figuring - an Ideal Tool for Precision Figuring of Optics?.- 9 Wider Applications of Ultra-Precision Technologies.- Some Aspects of Ultra-precision Sciences and Engineering in Medicine and Biosciences.- Microelectronic and Nanoelectronic Interfacing Techniques for Biological Systems.- Cutting Experiments in a Computer using Atomic Models of a Copper Crystal and a Diamond Tool.- 10 New Developments in Precision Engineering.- Precision Aspheric Generators for Off-axis X-ray Mirrors and Asymmetric Aspheric Lenses.- Design and Modeling of a Linear Microactuator.- Photon Scanning Tunneling Microscopy and Reflection Scanning Microscopy.- 11 Miscellanea.- Design and Performance Considerations of the Continuous Four-roll Bender: A Precision Machine for the Roller Bending of Plates.- Application of Variable Parametric Programming in Precision Machining Processes.- Micromachining of Hydraulic Elements.- An Interferometer for Measurement of Grating and Index Scale.- 12 Short Reports.- Ultraprecision Machining - A Theoretical Analysis of the Mechanisms of Surface Formation.- A Stylus Profilometer with one Nanometre Precision.- An Infinite-stiffness Aerostatic Bearing with an Exhaust-control Restrictor.- Analysis of Dynamic Coefficients for Multirecess Hydrostatic Journal Bearings with Journal Rotation by Finite Element Method.- Measurement of Sub Surface Damage in Silicon Wafers.- Absolute Laserrefractometer.- Accuracy Average Effect of Linear Motion Ball Guides System for NC Machines - Theoretical Analysis.- Accuracy Average Effect of Linear Motion Ball Guides System for NC Machines - Experimental Verification.- Investigation of the Geometrical Properties of CCD Line Image Sensors.- Optical Linewidth Measurement on Masks and Wafers in the Micrometre and Submicrometre Range.- Absolute Flatness Testing.- Kinetic Factors in Electropolishing.- Precise Performance Tests of Machine Tools with the use of a Computerised Measuring System.- The Real Contact Area Measurement by Means of Scanning Profilometry.- High-efficiency Polishing of Polycrystalline Diamond.- A Differential Laser Autocollimation Probe for On-Machine-Measurement.- A New Method of Angle Measurement Based on Internal Reflection Effect.- An Ultra-fine Infeed Controller.- Intercomparison Flatness Measurements on a Granite Surface Plate.- Is it Possible to use Carbide Tools for Ultra-precision Cutting?.- The Straightness Error Compensation Based on the P-integrator Learning Control in High Precision Lathe.- The Research of Super-precision Grinding Control System for Axital Dimension of Hydro Servo Valve Rod.- Bluntness of the Tool and Process Forces in High-precision Cutting.- Design of High Performance Externally Pressurized Gas Bearings.- Mechanisms and Models of Diamond Turning: Theoretical Analysis and Experimental Investigation.- Effect of Crystallographic Orientation on Micro-deformation Processing.- Long Travel Optical Servo Probe.- A New Optical Profilometer for Optical Smooth Surfaces.- Precision Engineering of Aspherical Optical Surfaces for Silicate Glass Components.- Investigations on Single Crystal Diamond Tools for the Ultra-Precision Manufacturing Process.- Micro-positioning Stage of 6 Degree-of-freedom with Nanometer Resolution.- Measurement of Flatness of Technical Surfaces Using Anamorphotic Planinterferometer.- Measurement of Gap and Parameters in the Polishing Process of Optical Glass.- Results of Contactless Measurement of Lubricant Film Thickness in Precision Ball Bearings.- Acceleration and Distance Sensors for Machine Vibration Measurement.- Design and Manufacture of Ultra-Precision Three-Axis Test System with Air Bearing Supports.- Computersimulation for Determining the Machined Surface Using Process Parameters in Single Point Diamond Turning.- Dynamical Behaviour of an Ultra-Precision Turning Machine.- Advanced Wheel Conditioning Technique for Form Wheel Diamond Grinding of Ceramic and Glass Materials.- 13 Appendix.- Some Observations on Tool Wear in Single Point Diamond Turning of Stainless Steel.- High Resolution Optical Spectroscopy.- Consequence of Orientation on the Single Crystal Diamond Cutting Tool.- Ceramics in Finish Machining.- Separation of Correction of the Dynamic Error of the Grating Type Single-flank Mesh Gear Tester.- 14 Author Index.