Plasma Etching
Fundamentals and Applications
By: Minoru Sugawara, M. Sugawara, Barry L. Stansfield (As told to)
Hardcover | 1 May 1998
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Hardcover
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ISBN: 9780198562870
ISBN-10: 019856287X
Series: Series on Semiconductor Science and Technology, 7
Published: 1st May 1998
Format: Hardcover
Language: English
Number of Pages: 360
Audience: Professional and Scholarly
Publisher: Oxford University Press
Country of Publication: GB
Dimensions (cm): 23.39 x 15.6 x 2.06
Weight (kg): 0.68
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This product is categorised by
- Non-FictionSciencePhysicsMaterials & States of MatterPlasma Physics
- Non-FictionSciencePhysicsApplied Physics
- Non-FictionEngineering & TechnologyEnergy Technology & EngineeringElectrical Engineering
- Non-FictionEngineering & TechnologyMechanical Engineering & MaterialsMaterials Science
- Non-FictionEngineering & TechnologyElectronics & Communications EngineeringElectronics EngineeringCircuits & Components
- Non-FictionEngineering & TechnologyElectronics & Communications EngineeringElectronics EngineeringElectronic Devices & MaterialsSemi-Conductors & Super-Conductors