Plasma Etching

An Introduction

By: Dennis M. Manos (Editor), Daniel L. Flamm (Editor)

Write A Review

eBook | 8 September 1989

At a Glance

ePUB
476 Pages

eBook

RRP $209.00

$188.99

10%OFF

or 4 interest-free payments of $47.25 with

Instant Digital Delivery to your Kobo Reader App

Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.