Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators

By: Gerhard Lammel, Sandra Schweizer, Philippe Renaud

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Hardcover | 31 January 2002

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Hardcover
284 Pages

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24.13 x 15.88 x 1.27

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Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators shows how to design and fabricate optical microsystems using innovative technologies and and original architectures. A barcode scanner, laser projection mirror and a microspectrometer are explained in detail, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, device test, packaging all the way to the system assembly.

An advanced microscanning device capable of one- and two-dimensional scanning can be integrated in a compact barcode scanning system composed of a laser diode and adapted optics. The original design of the microscanner combines efficiently the miniaturized thermal mechanical actuator and the reflecting mirror, providing a one-dimensional scanning or an unique combination of two movements, depending on the geometry. The simplicity of the device makes it a competitive component.

The authors rethink the design of a miniaturized optical device and find a compact solution for a microspectrometer, based on a tunable filter and a single pixel detector. A porous silicon technology combines efficiently the optical filter function with a thermal mechanical actuator on chip. The methodology for design and process calibration are discussed in detail. The device is the core component of an infrared gas spectrometer.

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Non-Fiction Engineering & Technology Mechanical Engineering & Materials Mechanical Engineering Materials Science Energy Technology & Engineering Electrical Engineering Other Technologies & Applied Sciences Applied Optics Technology in General Technical Design Electronics & Communications Engineering

Electronics Engineering

Preface	p. xi
Introduction	p. 1
Motivation	p. 1
Mems	p. 2
Moems	p. 3
Display technologies	p. 3
Printers and industrial machining	p. 9
Imaging scanners	p. 9
Telecommunication	p. 10
Adaptive or corrective optics	p. 12
Spectroscopy applications	p. 13
Medical applications	p. 15
Moems actuation principles	p. 16
Electrostatic actuation	p. 17
Piezoelectric actuation	p. 22
Magnetic actuation	p. 23
Thermal actuation	p. 24
Basics for a thermally actuated micromirror	p. 27
Microactuator specifications	p. 27
Principle of the presented microscanner	p. 28
The thermal bimorph actuator	p. 28
Thermal expansion	p. 29
Stress in bimorph cantilevers and initial rest position	p. 29
Thermal bimorph actuator design	p. 41
Static temperature distribution in the microscanner	p. 46
Analytical model	p. 46
Determination of constants	p. 51
Influence of the different constants on the temperature distribution	p. 55
Summary	p. 58
Response time of the bimorph beam	p. 59
Thermal cut-off	p. 59
Measurements of the cut-off frequency of the bimorph actuator	p. 60
Conclusion	p. 61
Dynamic temperature distribution in the bimorph beam	p. 62
General conclusions	p. 64
Microscanner technology	p. 67
Fabrication process	p. 67
Process improvements	p. 70
Dry mirror release	p. 70
Mirror stiffness and flatness improvement	p. 70
Mirror reflectivity	p. 76
Conclusions	p. 76
One-dimensional microscanner	p. 77
Test Set-up	p. 77
Static characterization of Chromium based actuators	p. 78
Single device characterization	p. 78
Comparing angular deflection among various devices	p. 80
Resistance variation of Cr layer with temperature	p. 84
Static characterization of Nickel based actuators	p. 86
Angle vs. temperature	p. 86
Resistance vs. temperature	p. 86
Angle vs. power	p. 87
Summary	p. 88
Dynamic characterization	p. 88
Fundamental resonance frequency calculation	p. 89
Experimental comparison of the resonance frequency	p. 94
Influence of damping	p. 97
Thermal cut-off	p. 98
Dynamic microscanner performances	p. 98
Lateral suspension mirror	p. 100
Dynamics of the tunable optical filter with Ni based actuator	p. 102
Summary	p. 104
1D scanner applications	p. 105
Barcode reader	p. 105
Micromechanical detector for molecular beams	p. 109
Conclusions	p. 111
Two-dimensional microscanner	p. 113
Principle	p. 113
Design and modelling of the raster natural frequency	p. 113
Analytical model	p. 113
Simulations	p. 119
Dynamic measurements	p. 120
2D-microscanner type 1	p. 120
2D-microscanner type 2	p. 122
Summary	p. 123
Microprojector application	p. 123
Scanner requirements	p. 123
Pixel resolution	p. 124
Static and dynamic mirror deformations	p. 126
Experimental results	p. 127
Conclusions	p. 133
Advanced Optical Filters of Porous Silicon	p. 135
Principle	p. 135
History of porous silicon	p. 136
Fabrication of porous silicon	p. 136
Single etch cell	p. 137
Double etch cell	p. 138
Parameters determining the structure of porous silicon	p. 139
Why porous silicon is porous	p. 139
Substrate doping	p. 140
Illumination	p. 141
Electrolyte concentration	p. 141
Current densities	p. 142
Electropolishing	p. 144
Porous silicon as sacrificial layer	p. 145
Calculation of optical interference filters	p. 145
Principle	p. 145
General theory for simulation of optical multilayer filters	p. 146
Bragg band reflectors	p. 148
Fabry-Perot bandpass filters	p. 150
Multi band reflectors	p. 151
Edge filters	p. 152
Angular dependence	p. 153
Fabrication of optical filter of porous silicon	p. 153
Effective media theory	p. 153
Lateral homogeneity	p. 156
Depth homogeneity	p. 156
Oxidation and aging	p. 161
Summary	p. 163
Micromachining using porous Silicon	p. 165
Goals for the technology	p. 165
Metal masks	p. 166
Nitride masks	p. 167
Free-standing porous silicon films	p. 167
Mask removal	p. 169
Thermal actuator design	p. 169
Calculation of optimum layer thicknesses	p. 173
Calculation of beam length	p. 180
Electrical heater resistance	p. 180
Mechanical filter plate suspension	p. 181
Shape and size of filter plate	p. 181
Ways of suspension	p. 181
Homogeneity of the optical filter	p. 184
Frontside mask only	p. 185
Frontside and backside mask	p. 186
Experimental comparison	p. 187
Electropolished well	p. 189
Process flow	p. 190
Summary	p. 193
Tunable Optical Filter and IR Gas Spectroscopy	p. 195
Overview of devices	p. 195
Optical characterization	p. 198
Visible light	p. 198
Infrared light	p. 200
Chip separation and packaging	p. 202
Cleaving	p. 202
Bonding on PCB	p. 204
Encapsulation	p. 204
Protection by a fusible link	p. 205
System integration for gas sensing	p. 205
Principle of infrared gas absorption spectroscopy	p. 205
Set-up	p. 208
Experimental results	p. 208
Summary	p. 210
Conclusions and outlook	p. 211
Conclusions	p. 211
Micromirror	p. 211
Tunable optical filter	p. 213
Outlook	p. 215
Appendices	p. 217
Complement to the curvature calculation due to residual stress	p. 217
Complement to the static temperature distribution calculation	p. 221
Large deflections	p. 225
References	p. 229
Symbols and Abbreviations	p. 255
Glossary of terms	p. 263
Acknowledgments	p. 267
Table of Contents provided by Syndetics. All Rights Reserved.

Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators

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