Next-Generation Actuators Leading Breakthroughs

Next-Generation Actuators.- Surface Acoustic Wave Motor Modeling and Motion Control.- AZARASHI (Seal) Mechanism for Meso/Micro/Nano Manipulators.- Disturbance Observer Design Based on Frequency Domain.- Development of High-Speed Actuator for Scanning Probe Microscopy.- PZT Driven Micro XY Stage.- Precise Position Stages Using Pneumatically Driven Bellows Actuator and Cylinder Equipped with Air Bearings.- Development of a New Nano-Micro Solid Processing Technology Based on a LIGA Process and Next-Generation Microactuators.- New Microactuators Using Functional Floods.- Two-Axial Piezoelectric Actuator and Its Motion Control Toward Development of a Tactile Display.- High-Performance Electrostatic Micromirrors.- Non-Contact On-Chip Manipulation of 3-D Microtools and Its Applications.- Shape Memory Piezoelectric Actuator and Various Memories in Ferroelectric Materials.- Design and Fabrication of Micro Pump for Functional Fluid Power Actuation System.- Intellignet Actuators for Mechatronics with Multi-Degrees of Freedom. - Actuation of Long Flexible Cables Using Ciliary Vibration Drive.- Micro Cilium Actuators in Group.- Novel Thin-Type High-Speed Ultrasonic Motors and Gyro-Moment Motors.- Biochemical Pump with Enzymatic Reaction.- Domain Wall Engineering in Lead-Free Piezoelectric Materials and Their Enhanced Piezoelectricities. IPMC Actuator.- Pneumatic Rubber Artificial Muscles and Application to Welfare Robotics.- Dynamic Characteristics of Ultrasonic Motors.- Actuator with Multi Degrees of Freedom.- Segment-Structured Diamond-Like Carbon Films Application to Friction Drive of Surface Acoustic Wave Linear Motor.- Mechanism of Electroactive Polymer Actuator.- Development of a Polymer Actuator Utilizing Ion-Gel as Electrolyte.- Compact MR Fluid Actuator for Human Friendly System.- Development of Actuator Utilizing Hydrogen Storage Alloys.- Development of New Actuators for Special Environment.- Applications of Electrostatic Actuators within Special Environments.- Micro Actuator System for Narrow Spaces Under Specific Environment.- Development of Ultrasonic Micro Motor with a Coil Type Stator.- Self-Running Non-Contact Ultrasonically Levitated Stage.- Development of Shape Memory Actuator for Cryogenic Application.- Actuators for Special Environments.