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Nanoscience and Technology : NanoScience and Technology - Seongbo Shim

Nanoscience and Technology

By: Seongbo Shim, Youngsoo Shin

Paperback | 8 February 2019

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This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.

Other Editions and Formats

Hardcover

Published: 3rd April 2018

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