Microsystems

By: Nicolae Lobontiu

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Hardcover | 3 October 2007

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Hardcover
416 Pages

Dimensions(cm)
23.5 x 15.88 x 2.54

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Dynamics of Microelectromechanical Systems is a systematic overview of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.

Features of this work include:

An in-depth treatment of problems that involve reliable modeling, analysis and design,
Analytical models with correct dependences on service dimensions,
Cantilever based systems for nanofabrication researchers and designers, and
Dynamics of complex spring and beam microsystems.

This material contains numerous fully-solved examples as well as many end-of-the-chapter problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained. An instructor's solution manual is available on the book's webpage at springer.com.

Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.

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Preface	p. ix
Microcantilevers and Microbridges: Bending and Torsion Resonant Frequencies	p. 1
Introduction	p. 1
Modal Analytical Procedures	p. 3
Rayleigh's Quotient Method	p. 4
Lumped-Parameter Method	p. 7
Microcantilevers	p. 12
Single-Profile Microcantilevers	p. 13
Multiple-Profile Microcantilevers	p. 26
Multi-Layer (Sandwich) Microcantilevers	p. 61
Microbridges	p. 67
Single-Profile Microbridges	p. 68
Multiple-Profile Microbridges	p. 80
Multi-Layer (Sandwich) Microbridges	p. 101
Mass Detection by the Resonant Frequency Shift Method	p. 106
Method	p. 106
Microcantilever Support	p. 108
Microbridge Support	p. 122
Problems	p. 128
Micromechanical Systems: Modal Analysis	p. 139
Introduction	p. 139
Single Degree-of-Freedom Mass-Spring Micromechanical Systems	p. 139
Paddle Microcantilever	p. 140
Paddle Microbridge	p. 144
Rotary Motion Systems	p. 147
Microaccelerometers	p. 152
Multiple Degree-of-Freedom Mass-Spring Micromechanical Systems	p. 164
Lagrange's Equations	p. 165
Single-Mass Mechanical Microsystems	p. 178
Two-Mass Mechanical Microsystems	p. 208
Problems	p. 219
Energy Losses in MEMS and Equivalent Viscous Damping	p. 229
Introduction	p. 229
Lumped-Parameter Viscous Damping	p. 229
Viscous Damping Coefficient and Damping Ratio	p. 229
Complex Number Representation of Vectors	p. 232
Q-Factor	p. 234
Structural Damping	p. 244
Squeeze-Film Damping	p. 247
Continuum Flow Regime	p. 247
Free Molecular Flow Regime	p. 254
Squeze-Film Damping for Rotary-Motion Plates	p. 257
Squeze-Film Damping: Translatory Perforated Plates	p. 262
Slide-Film Damping	p. 265
Continuum Flow Regime	p. 265
Slip Flow Regime	p. 269
Free-Molecular Flow Regime and Unifying Theories	p. 280
Thermoelastic Damping	p. 281
Other Intrinsic Losses	p. 284
Substrate (Anchor) Losses	p. 287
Surface Losses	p. 290
Problems	p. 291
Frequency and Time Response of MEMS	p. 299
Introduction	p. 299
Frequency Response of MEMS	p. 299
Frequency Response	p. 300
Transfer Function Approach to Frequency Response	p. 305
Electrical Microsystems	p. 327
Mechanical-Electrical Analogy	p. 334
Electromechanical Microsystems with Variable Capacity	p. 341
Microgyroscopes	p. 345
Resonant Frequencies and the Laplace Method	p. 349
Tuning Forks	p. 351
Time-Domain Response of MEMS	p. 356
Time-Domain Laplace-Transform Modeling and Solution	p. 356
State-Space Modeling	p. 358
Transfer-Function to State-Space Model Transformation	p. 365
Time-Stepping Schemes	p. 367
Approximate Methods and Nonlinear MEMS Problems	p. 376
Problems	p. 381
Index	p. 395
Table of Contents provided by Ingram. All Rights Reserved.

Microsystems

At a Glance

Hardcover

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