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Microsystem Technology and Microrobotics - Sergej Fatikow

Microsystem Technology and Microrobotics

By: Sergej Fatikow, Ulrich Rembold

eBook | 17 April 2013

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Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

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Non-Fiction Computing & I.T.Computer Science Artificial Intelligence Engineering & Technology Technology in General Engineering in General Electronics & Communications Engineering Electronics Engineering Reference, Information & Interdisciplinary Subjects Research & Information Information theory

Cybernetics & Systems Theory Library & Info Sciences Library & Information Services Maths for Engineers Mathematics Applied Mathematics

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