Microfluidics and Biomems Applications

By: Francis E. H. Tay (Editor)

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Hardcover | 1 September 2002

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364 Pages

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23.5 x 16.51 x 1.91

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Microfluidics and BioMEMS Applications central idea is on microfluidics, a relatively new research field which finds its niche in biomedical devices, especially on lab-on-a-chip and related products. Being the essential component in providing driving fluidic flows, an example of micropump is chosen to illustrate a complete cycle in development of microfluidic devices which include literature review, designing and modelling, fabrication and testing. A few articles are included to demonstrate the idea of tackling this research problem, and they cover the main development scope discussed earlier as well as other advanced modelling schemes for microfluidics and beyond.

Scientists and students working in the areas of MEMS and microfluidics will benefit from this book, which may serve both communities as both a reference monograph and a textbook for courses in numerical simulation, and design and development of microfluidic devices.

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Table of Contents	p. v
List of Contributors	p. ix
Foreword	p. xi
Preface	p. xiii
Acknowledgements	p. xxi
	p. 1
Literature Review for Micropumps	p. 3
Origins of Micropump Research	p. 3
Mechanical Micropumps	p. 5
Reciprocating Micropumps	p. 8
Piezoelectric Actuation	p. 9
Thermo-pneumatic Actuation	p. 10
Electrostatic Actuation	p. 11
Pneumatic Actuation	p. 12
Shape Memory Alloy (SMA) Actuation	p. 13
Peristaltic Micropumps	p. 14
Piezoelectric Actuation	p. 15
Thermo-pneumatic Actuation	p. 15
Reciprocating Micropumps With Dynamic Micro-valves	p. 16
Non-mechanical Micropumps	p. 18
Electro-hydrodynamic (EHD) Micropumps	p. 18
DC-charge injection EHD micropump	p. 18
Travelling wave voltage EHD micropump	p. 19
Electro-osmotic Micropumps	p. 20
Ultrasonic Micropumps	p. 21
Magneto-hydrodynamic (MHD) Micropumps	p. 22
Motivation	p. 23
Design Rules for Micropumps	p. 25
Preliminary Design	p. 25
Piezoelectric Actuation	p. 26
Compression Ratio	p. 29
Determination of Volume Stroke	p. 30
Analytical Model	p. 31
Finite Element Model	p. 35
Determination of Dead Volume	p. 42
Determination of Compression Ratio	p. 43
Criterion for Switching of Valve	p. 43
Surface Energy Consideration	p. 44
Elasto-mechanical Consideration	p. 46
Criterion for Self-priming Capability	p. 48
Criterion for Bubble Tolerance	p. 50
Modelling and Simulation	p. 53
Background of Microfluidics Systems Modelling	p. 53
Governing Equation for Micro-pumps	p. 54
Modelling of the Actuator Unit	p. 57
Modelling of the Inlet Valve	p. 61
Modelling of the Outlet Valve	p. 64
System Model of Proposed Micro-pump	p. 65
Process Development and Fabrication	p. 69
Bulk Silicon Micromachining	p. 70
Photolithography	p. 70
Thin Film Deposition	p. 72
Oxidation of Silicon	p. 72
Low Pressure Chemical Vapour Deposition of Silicon Nitride	p. 74
Wet Etching	p. 74
Concave Mask Geometry	p. 76
Convex Mask Geometry	p. 78
Dry Etching	p. 81
Process Flow	p. 82
Silicon Process	p. 82
Glass Process For Top Glass Wafer	p. 92
Glass Process For Bottom Glass Wafer	p. 93
Wafer Bonding	p. 95
Verification and Testing	p. 101
Experimental Set-up	p. 101
Piezoelectric Actuator Unit Model Verification	p. 104
Analytical Model Verification	p. 104
FEM Model Verification	p. 107
Preliminary Functional Tests	p. 109
Conclusions And Recommendations	p. 111
Conclusions	p. 111
Recommendations	p. 112
References	p. 115
Appendices	p. 121
Appendix A	p. 121
Appendix B	p. 128
Appendix C	p. 133
Appendix D	p. 138
	p. 141
Development of Integrated Microfluidic Devices for Genetic Analysis	p. 143
Microfluidic Devices on Printed Circuit Board	p. 185
Nano and Micro Channel Flows of Bio-Molecular Suspension	p. 219
Transport of Liquid in Rectangular Micro-Channels by Electroosmotic Pumping	p. 265
A Development of Slip Model and Slip-Corrected Reynolds Equation for Gas Lubrication in Magnetic Storage Device	p. 287
Short Notes on Particle Image Velocimetry for Micro/Nano Fluidic Measurements	p. 307
Index	p. 331
Table of Contents provided by Syndetics. All Rights Reserved.

Microfluidics and Biomems Applications

At a Glance

Hardcover

Shipping

How to return your order

Defective items

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