| Preface | p. v |
| Nomenclature | p. xiii |
| Basic Concepts and Technologies | p. 1 |
| New Flow Regimes in MEMS | p. 1 |
| The Continuum Hypothesis | p. 7 |
| Molecular Magnitudes | p. 11 |
| Mixed Flow Regimes | p. 16 |
| Experimental Evidence | p. 17 |
| The Pioneers | p. 21 |
| Full-System Simulation of MEMS | p. 24 |
| Modeling of Micro Flows | p. 31 |
| Governing Equations and Slip Models | p. 39 |
| The Basic Equations of Fluid Dynamics | p. 39 |
| Incompressible Flow | p. 42 |
| Reduced Models | p. 44 |
| Compressible Flow | p. 45 |
| First-Order Models | p. 47 |
| The Role of the Accommodation Coefficients | p. 49 |
| High-Order Models | p. 53 |
| Derivation of High-Order Slip Models | p. 54 |
| General Slip Condition | p. 57 |
| Comparison of Slip Models | p. 61 |
| Shear-Driven and Separated Micro Flows | p. 63 |
| Couette Flow | p. 63 |
| Cavity Flow | p. 67 |
| Grooved Channel Flow | p. 68 |
| Separated Internal Flows | p. 71 |
| Validation of Slip Models with DSMC | p. 77 |
| Separated External Flows | p. 83 |
| Pressure-Driven Micro Flows: Slip Flow Regime | p. 87 |
| Isothermal Compressible Flows | p. 87 |
| Adiabatic Compressible Flows - Fanno Theory | p. 95 |
| Inlet Flows | p. 101 |
| Validation of Slip Models with DSMC | p. 102 |
| Effects of Roughness | p. 108 |
| Pressue-Driven Micro Flows: Transition and Free-Molecular Regimes | p. 113 |
| Transition and Free-Molecular Flow Regimes | p. 113 |
| Burnett Equations in Micro Channels | p. 117 |
| A Unified Flow Model | p. 119 |
| Velocity Scaling | p. 119 |
| Flowrate Scaling | p. 122 |
| Model for Pipe and Duct Flows | p. 127 |
| Thermal Effects in Micro Scales | p. 139 |
| Thermal Creep (Transpiration) | p. 139 |
| Simulation Results | p. 141 |
| A Thermal Creep Experiment | p. 145 |
| Knudsen Compressors | p. 146 |
| Other Temperature-Induced Flows | p. 147 |
| Heat Conduction and the Ghost Effect | p. 149 |
| Heat Transfer in Micro Poiseuille Flows | p. 151 |
| Heat Transfer in Micro Couette Flows | p. 158 |
| Prototype Applications of Gas Micro Flows | p. 163 |
| Gas Damping and Dynamic Response of MEMS | p. 163 |
| Reynolds Equation | p. 166 |
| Squeezed Film Effects in Accelerometers | p. 173 |
| Micro Propulsion and Micro Nozzle Flows | p. 178 |
| Micro Propulsion Analysis | p. 180 |
| Rarefaction and Other Effects | p. 184 |
| Electrokinetically Driven Liquid Micro Flows | p. 193 |
| Electrokinetic Effects - Review | p. 194 |
| The Electric Double Layer | p. 195 |
| Near-Wall Potential Distribution | p. 197 |
| Governing Equations for Electroosmotic Flows | p. 199 |
| Numerical Formulation and Validation | p. 200 |
| Electrokinetic Micro Channel Flows | p. 202 |
| EDL/Bulk Flow Interface Velocity Matching Condition | p. 207 |
| Electroosmotic Slip Condition | p. 208 |
| Approximate Evaluation of Drag Force due to Electroosmotic Effects | p. 209 |
| Complex Geometry Flows | p. 210 |
| Cross-Flow Junctions | p. 211 |
| Array of Circular and Square Posts | p. 213 |
| Dielectrophoresis | p. 215 |
| Numerical Methods for Continuum Simulation | p. 223 |
| A High-Order Numerical Method: The ¿Flow Code | p. 224 |
| Formulation for Incompressible Micro Flows | p. 228 |
| Formulation for Compressible Micro Flows | p. 231 |
| Implementation of Slip Boundary Conditions | p. 236 |
| Validation Problems | p. 237 |
| A Meshless Numerical Method | p. 239 |
| The Force Coupling Method for Particulate Micro Flows | p. 246 |
| Numerical Methods for Atomistic Simulation | p. 257 |
| Molecular Dynamics (MD) Method | p. 257 |
| MD-Continuum Coupling | p. 263 |
| Direct Simulation Monte Carlo (DSMC) Method | p. 266 |
| Limitations and Errors in DSMC | p. 269 |
| DSMC-Information Preservation Method | p. 274 |
| DSMC-Continuum Coupling | p. 275 |
| The Boltzmann Equation | p. 279 |
| General Theory | p. 279 |
| Classical Solutions of Boltzmann Equation | p. 284 |
| Sone's Asymptotic Theory of Boltzmann Equation | p. 288 |
| Numerical Solutions of Boltzmann Equation | p. 297 |
| Non-Isothermal Flows | p. 301 |
| Lattice-Boltzmann Method (LBM) | p. 303 |
| Comparison with Navier-Stokes Solutions | p. 306 |
| LBM Simulation of Micro Flows | p. 308 |
| Bibliography | p. 311 |
| Index | p. 335 |
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