Microengineering, MEMS, and Interfacing

A Practical Guide

By: Danny Banks

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eText | 23 March 2006 | Edition Number 1

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MEMS devices are finding increasingly widespread use in a variety of settings, from chemical and biological analysis to sensors and actuators in automotive applications. Along with this massive growth, the field is still experiencing growing pains as fabrication processes are refined and new applications are attempted. Anyone serious about entering