List of Contributors xi
Series Preface xiii
Preface xv
Part One Fundamentals 1
1 Overview of Micro Cutting 3
Dehong Huo and Kai Cheng
1.1 Background and Scope 3
1.1.1 Micro Manufacturing 3
1.1.2 History and Development Process of Micro Cutting 5
1.1.3 Definition and Scope of Micro Cutting 7
1.1.4 Micro Cutting and Nanometric Cutting 8
1.2 Materials in Micro Cutting 10
1.3 Micro Cutting Processes 11
1.3.1 Micro Turning 12
1.3.2 Micro Milling 12
1.3.3 Micro Drilling 13
1.3.4 Micro Grinding 14
1.4 Micro Cutting Framework 14
References 16
2 Micro Cutting Mechanics 19
Dehong Huo and Kai Cheng
2.1 Introduction 19
2.2 Characterization of Micro Cutting 20
2.2.1 Micro Cutting and Ultra-Precision Machining 21
2.2.2 Enabling Technologies for Micro Cutting 22
2.3 Micro Cutting Mechanics 25
2.3.1 Size Effects 26
2.3.2 Chip Formation and Minimum Chip Thickness 27
2.3.3 Specific Cutting Energy and Micro Cutting Force Modelling
29
2.3.4 Surface Generation and Burr Formation 33
2.4 Micro Machinability Issues and the Scientific Approaches
39
2.4.1 Vibration Assisted Micro Cutting 40
2.4.2 Laser Assisted Micro Cutting 40
2.5 Summary 41
References 42
3 Micro Tooling Design and Manufacturing 45
Paul T. Mativenga, Ampara Aramcharoen and Dehong Huo
3.1 Tool Size and Machining Scale 45
3.2 Manufacturing Methods for Solid Shank Micro Tools 46
3.3 Coatings and Coated Solid Shank Micro Tools 48
3.3.1 Closed Field Unbalanced Magnetron Sputter Ion Plating
(CFUBMSIP) 50
3.3.2 Coating Layout 50
3.4 Importance of Coated Micro Tools 52
3.5 Diamond Micro Cutting Tools 53
3.6 Micro Cutting Tool Wear 55
3.7 Smart Cutting Tools 58
References 59
4 Ultraprecision and Micro Machine Tools for Micro Cutting
63
Christian Brecher and Christian Wenzel
4.1 Introduction 63
4.2 Components of High Precision Machine Tools 64
4.2.1 Machine Base Materials 65
4.2.2 Drive Systems 66
4.2.3 Guidance Systems 69
4.2.4 Control Systems and Amplifiers 70
4.3 Diamond Turning Machines and Components 70
4.3.1 Typical Machine Setup 71
4.3.2 Market Comparison 73
4.3.3 Fast Tool Servo Technology 78
4.4 Precision Milling Machines 79
References 85
5 Engineering Materials for Micro Cutting 87
Sathyan Subbiah and Shreyes N. Melkote
5.1 Introduction 87
5.2 ?Size? Effects 88
5.3 Strain and Stress in Cutting 90
5.4 Elastic and Plastic Behaviours at the Micro-scale 94
5.5 Fracture 99
5.6 Metals, Brittle Materials and Others 105
5.6.1 Pure Materials 105
5.6.2 Ductile Metals 106
5.6.3 Brittle Materials ? Glass, Silicon, Germanium, Tungsten
Carbide 107
5.6.4 Other Materials ? Amorphous Alloys, Graphene and
Embedded Polymers 108
5.7 Summary 111
References 112
6 Modelling and Simulation of Micro Cutting 115
Ying-Chun Liang, Qing-Shun Bai and Jia-Xuan Chen
6.1 FE modelling and Analysis 116
6.1.1 Finite Element Model 116
6.1.2 Simulation on Micro-burr Formation 117
6.1.3 Influence of the Tool Edge Radius on Cutting Forces
118
6.1.4 Stress Distribution on the Micro-cutter 120
6.1.5 Micro-tool-tip Breakage 120
6.1.6 Thermal Analysis on Micro Cutting 123
6.2 Molecular Dynamics (MD) Modelling and Analysis 124
6.2.1 MD Modelling Process and Simulation 124
6.2.2 Modelling Analysis of Micro Cutting 127
6.2.3 Scratching Simulation by Using MD 128
6.2.4 Friction and Wear Simulation by Using MD 132
6.2.5 Effect of the Crystal Plane of Single Crystal and
Multicrystalline 135
6.2.6 Improvement of the MD Simulation Capability 137
6.3 Multiscale Modelling and Analysis 138
6.3.1 Advance in Multiscale Simulation Methods 140
6.3.2 Applications of Multiscale Simulation in Micro Cutting
Processes 143
6.3.3 Research Challenges and Future Trends 147
6.4 Summary 148
References 148
Part Two Applications 153
7 Diamond Turning and Micro Turning 155
Dehong Huo and Kai Cheng
7.1 Introduction 155
7.2 Ultra-precision Diamond Turning 155
7.2.1 A Historical Perspective of Diamond Turning 156
7.2.2 Material Perspectives 158
7.2.3 Micro Structuring by Diamond Turning 159
7.3 Micro Turning 166
7.3.1 Micro Turning Tool Fabrication 166
7.3.2 Micro Machines for Micro Turning 171
7.3.3 Size Effect Arising from Micro Turning 178
7.4 Challenges Arising from Micro Turning 182
References 182
8 Micro Milling: The State-of-the-art Approach Towards
Applications 185
Tao Wu and Kai Cheng
8.1 Introduction 185
8.2 Fundamental Elements in Micro Milling 186
8.2.1 Micro Milling Machines 187
8.2.2 Cutting Tools 189
8.2.3 Process Conditions 195
8.2.4 Work Materials 197
8.3 Micro Milling Mechanics 198
8.3.1 Size Effect in Micro-Scale Cutting 198
8.3.2 Minimum Chip Thickness 200
8.3.3 Work Micro Structure Effect 203
8.4 Modelling of the Micro Milling Process 205
8.4.1 Finite Element Modelling 206
8.4.2 Mechanistic Modelling 208
8.5 Metrology and Instrumentation 212
8.5.1 3D Surface Profilers 212
8.5.2 Microscopes 212
8.5.3 Process Monitoring Sensors and Systems 214
8.6 Scientific and Technological Challenges 217
8.6.1 Tool Run-out 217
8.6.2 Tool Wear and Life 218
8.6.3 Micro-Burr Formation 218
8.6.4 Process Conditions Optimization 219
8.7 Application Perspectives 220
8.8 Concluding Remarks 220
References 221
9 Micro Drilling Applications 227
M. J. Jackson, T. Novakov and K. Mosiman
9.1 Chapter Overview 227
9.2 Investigation of Chatter in Mesoscale Drilling 227
9.2.1 Torsional-axial Model 231
9.2.2 Bending Model 239
9.2.3 Combination of the Bending and Torsional-axial Models
242
9.2.4 Chatter Suppression 251
9.2.5 Research Challenges 256
9.3 Investigation of Chatter in Micro Drilling 257
9.4 Case Study: Micro Drilling Medical Polymer Materials and
Composites 265
9.4.1 Tooling Selection 266
9.4.2 Cutting Mechanisms and Considerations 267
9.4.3 Drilling 268
9.4.4 Burr Elimination when Drilling Polymers 269
9.5 Conclusions 270
Acknowledgements 271
References 272
10 Micro Grinding Applications 275
Han Huang
10.1 Introduction 275
10.2 Principles and Methodologies 278
10.2.1 Removal Mechanism in the Grinding of Brittle Materials
278
10.2.2 Interaction Between a Work Material and Diamond Abrasives
280
10.2.3 Grinding Approaches for Micro Grinding 285
10.3 Implementation Perspectives 286
10.3.1 Truing and Dressing 286
10.3.2 Characterization of Wheel Topography and Cutting Edge
Distribution 287
10.3.3 Measurement of Grit Height Distribution 291
10.3.4 Characterization of Abrasive Wear 292
10.3.5 Compensation Grinding 292
10.3.6 Pragmatic Aspects in Profile Grinding 297
10.3.7 Parametric Effects in Profile Grinding 298
10.4 Application Cases 299
10.4.1 Micro Grinding of Aspherical Moulds 299
10.4.2 Micro Grinding of Optical Fibre Connectors 305
Acknowledgements 311
References 311
11 In-Process Micro/Nano Measurement for Micro Cutting
315
Wei Gao, Kang-Won Lee, Young-Jin Noh, Yoshikazu Arai and Yuki
Shimizu
11.1 Introduction 315
11.2 The Hybrid Instrument for Micro Cutting and In-process
Measurement 316
11.3 In-process Measurement of Micro Cutting Force 326
11.4 In-process Measurement of Micro Wear of Cutting Tool
331
11.5 In-process Measurement of Micro Surface Form 337
11.6 Summary 342
References 343
Index 345
