Mems--Microelectromechanical Systems Series

By: Steve P. Beeby, Graham Ensel, Michael E. Kraft, Neil M. White

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Hardcover | 30 April 2004

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284 Pages

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25.4 x 17.78 x 1.91

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The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.

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Preface	p. ix
Introduction	p. 1
Motivation for the Book	p. 1
What Are MEMS?	p. 2
Mechanical Transducers	p. 3
Why Silicon?	p. 4
For Whom Is This Book Intended?	p. 5
References	p. 5
Materials and Fabrication Techniques	p. 7
Introduction	p. 7
Materials	p. 7
Substrates	p. 7
Additive Materials	p. 11
Fabrication Techniques	p. 11
Deposition	p. 12
Lithography	p. 17
Etching	p. 21
Surface Micromachining	p. 28
Wafer Bonding	p. 29
Thick-Film Screen Printing	p. 32
Electroplating	p. 33
LIGA	p. 34
Porous Silicon	p. 35
Electrochemical Etch Stop	p. 35
Focused Ion Beam Etching and Deposition	p. 36
References	p. 36
MEMS Simulation and Design Tools	p. 39
Introduction	p. 39
Simulation and Design Tools	p. 40
Behavioral Modeling Simulation Tools	p. 40
Finite Element Simulation Tools	p. 43
References	p. 56
Mechanical Sensor Packaging	p. 57
Introduction	p. 57
Standard IC Packages	p. 58
Ceramic Packages	p. 58
Plastic Packages	p. 59
Metal Packages	p. 59
Packaging Processes	p. 59
Electrical Interconnects	p. 60
Methods of Die Attachment	p. 63
Sealing Techniques	p. 65
MEMS Mechanical Sensor Packaging	p. 66
Protection of the Sensor from Environmental Effects	p. 67
Protecting the Environment from the Sensor	p. 71
Mechanical Isolation of Sensor Chips	p. 71
Conclusions	p. 80
References	p. 81
Mechanical Transduction Techniques	p. 85
Piezoresistivity	p. 85
Piezoelectricity	p. 89
Capacitive Techniques	p. 92
Optical Techniques	p. 94
Intensity	p. 94
Phase	p. 95
Wavelength	p. 96
Spatial Position	p. 96
Frequency	p. 96
Polarization	p. 97
Resonant Techniques	p. 97
Vibration Excitation and Detection Mechanisms	p. 98
Resonator Design Characteristics	p. 99
Actuation Techniques	p. 104
Electrostatic	p. 104
Piezoelectric	p. 107
Thermal	p. 107
Magnetic	p. 109
Smart Sensors	p. 109
References	p. 112
Pressure Sensors	p. 113
Introduction	p. 113
Physics of Pressure Sensing	p. 114
Pressure Sensor Specifications	p. 117
Dynamic Pressure Sensing	p. 120
Pressure Sensor Types	p. 121
Traditional Pressure Sensors	p. 121
Manometer	p. 121
Aneroid Barometers	p. 122
Bourdon Tube	p. 122
Vacuum Sensors	p. 123
Diaphragm-Based Pressure Sensors	p. 123
Analysis of Small Deflection Diaphragm	p. 125
Medium Deflection Diaphragm Analysis	p. 127
Membrane Analysis	p. 127
Bossed Diaphragm Analysis	p. 128
Corrugated Diaphragms	p. 129
Traditional Diaphragm Transduction Mechanisms	p. 129
MEMS Technology Pressure Sensors	p. 130
Micromachined Silicon Diaphragms	p. 130
Piezoresistive Pressure Sensors	p. 132
Capacitive Pressure Sensors	p. 137
Resonant Pressure Sensors	p. 139
Other MEMS Pressure Sensing Techniques	p. 142
Microphones	p. 143
Conclusions	p. 145
References	p. 145
Force and Torque Sensors	p. 153
Introduction	p. 153
Silicon-Based Devices	p. 154
Resonant and SAW Devices	p. 157
Optical Devices	p. 159
Capacitive Devices	p. 160
Magnetic Devices	p. 162
Atomic Force Microscope and Scanning Probes	p. 164
Tactile Sensors	p. 166
Future Devices	p. 168
References	p. 168
Inertial Sensors	p. 173
Introduction	p. 173
Micromachined Accelerometer	p. 175
Principle of Operation	p. 175
Research Prototype Micromachined Accelerometers	p. 180
Commercial Micromachined Accelerometer	p. 192
Micromachined Gyroscopes	p. 195
Principle of Operation	p. 195
Research Prototypes	p. 199
Commercial Micromachined Gyroscopes	p. 204
Future Inertial Micromachined Sensors	p. 206
References	p. 207
Flow Sensors	p. 213
Introduction to Microfluidics and Applications for Micro Flow Sensors	p. 214
Thermal Flow Sensors	p. 217
Research Devices	p. 219
Commercial Devices	p. 225
Pressure Difference Flow Sensors	p. 229
Force Transfer Flow Sensors	p. 232
Drag Force	p. 232
Lift Force	p. 235
Coriolis Force	p. 236
Static Turbine Flow Meter	p. 238
Nonthermal Time of Flight Flow Sensors	p. 239
Electrohydrodynamic	p. 239
Electrochemical	p. 240
Flow Sensor Based on the Faraday Principle	p. 241
Flow Sensor Based on the Periodic Flapping Motion	p. 242
Flow Imaging	p. 243
Optical Flow Measurement	p. 245
Fluid Velocity Measurement	p. 245
Particle Detection and Counting	p. 246
Multiphase Flow Detection	p. 246
Turbulent Flow Studies	p. 247
Conclusion	p. 248
References	p. 250
About the Authors	p. 257
Index	p. 259
Table of Contents provided by Rittenhouse. All Rights Reserved.

Mems--Microelectromechanical Systems Series

At a Glance

Hardcover

Shipping

How to return your order

Defective items

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