Materials Processing by Cluster Ion Beams

Name: Materials Processing by Cluster Ion Beams
Brand: Taylor & Francis Ltd
Price: 94.99 AUD
Availability: BackOrder

History, Technology, and Applications

By: Isao Yamada

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Paperback | 10 December 2019 | Edition Number 1

At a Glance

Paperback
262 Pages

Dimensions(cm)
23.4 x 15.6 x 1.4

Paperback

RRP $108.00

$94.99

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Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing.

Written by the originator of the gas cluster ion beam (GCIB) concept, this book:

Offers an overview of ion beam technologies, from the discovery of monomer ions to the introduction of GCIBs
Explores the development of sources for producing cluster beams from solid materials
Describes the engineering characteristics of gas cluster ion beam equipment
Covers cluster ion-solid surface interaction kinetics as well as sputtering, implantation, and ion-assisted deposition
Details surface processing techniques for smoothing, shallow implantation, and preparation of high-quality thin films
Introduces representative examples of emerging GCIB industrial applications

Materials Processing by Cluster Ion Beams: History, Technology, and Applications provides a deeper understanding of the importance of cluster ion beams and their applications.

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