Laser Cleaning

By: Boris Luk`yanchuk (Editor)

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Hardcover | 1 December 2001

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480 Pages

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16.3 x 23.7 x 3.2

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Laser cleaning is very important for modern high technology. It is used, or considered for use in the fabrication of printed circuit boards, in the production of dynamic random access memory (DRAM), in lithography and epitaxial growth, for the removal of contaminations during via-hole production, and for the cleaning of micro-optical and micro-mechanical components. This work presents the mechanics of the cleaning processes, experimental results, and different applications, including laser cleaning of art. It contains review articles by leading specialists in laser cleaning who participated in the First International Workshop on Laser Cleaning, held in Singapore in 2001.

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"The fascination of this book lies in the narrative development of profound technical theories through clear mathematics and superb experimental studies ... It is a tour de force and includes a valuable table of nearly all the previous studies in laser cleaning up to around 2001. It is well illustrated and clearly laid out."

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Non-Fiction Engineering & Technology Other Technologies & Applied Sciences Applied Optics Laser Technology & Holography Mechanical Engineering & Materials Materials Science Science Physics Optical Physics Science in General Scientific Equipment

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Preface	p. 1
History
The Road to "Steam Laser Cleaning"	p. 23
Meeting Andrew C. Tam	p. 23
A cleaning method needed	p. 24
'Laser cleaning'	p. 26
'Steam laser cleaning'	p. 29
Steam laser cleaning with short-pulse IR-lasers	p. 33
Steam laser cleaning: direct imaging of the jet motion	p. 34
Opto-acoustic detection of the liquid film explosion	p. 40
Steam laser cleaning: study of the mechanism of the liquid film explosion	p. 41
Stencil masks again	p. 45
Acknowledgement	p. 46
Thanks to Andrew C. Tam	p. 46
References	p. 46
Dry Laser Cleaning
Dry Laser Cleaning of Particles by Nanosecond Pulses: Theory	p. 51
Introduction	p. 51
Adhesion potential and equation of motion	p. 53
Model expression for elastic-VdW potential	p. 53
Parabolic approximation	p. 57
Equation for the evolution of deformation h	p. 58
Damping coefficient	p. 59
Knudsen viscosity	p. 59
Stokes viscosity	p. 59
Absorption of sound	p. 60
Emission of sound	p. 61
Plastic deformation	p. 61
Thermal expansion	p. 62
Hierarchy of scales	p. 62
General equations	p. 63
Unilateral quasi-static expansion	p. 65
3D quasi-static expansion for finite beams with 1D heat conduction	p. 67
Comparison between different approximations	p. 68
Particle influence on the expansion of the substrate	p. 69
Unilateral dynamic expansion	p. 70
Thermal expansion of absorbing particle	p. 71
Transparent particle heated by the substrate	p. 72
Maximum energy of ejected particles	p. 72
Cleaning threshold	p. 73
General threshold conditions	p. 73
Short cleaning pulse	p. 74
Long cleaning pulse	p. 74
Over-damped movement	p. 75
Long pulses with steep fronts	p. 75
Single sinusoidal pulse in parabolic potential without damping	p. 76
Dependence of cleaning threshold on particle radius and pulse duration	p. 78
SiO[subscript 2] particles cleaned from Si wafers	p. 82
Experimental	p. 82
Cleaning threshold vs. radius	p. 83
Role of small oscillations in intensity	p. 86
Suggestions for cleaning experiments	p. 87
Conclusions	p. 89
Acknowledgements	p. 90
Quasi-static 3D thermal expansion	p. 90
Cleaning threshold with the single sinusoidal pulse	p. 95
References	p. 96
Optical Resonance and Near-Field Effects in Dry Laser Cleaning	p. 103
Introduction	p. 103
Optical resonance and near-field effects within the Mie theory	p. 106
Particle on the surface. Beyond the Mie theory	p. 117
Adhesion potential and Hamaker-Lifshitz constant	p. 128
Temperature under the particle	p. 138
Dynamics of the particle, 3D effects	p. 144
Comparison with experimental results	p. 155
Local substrate ablation--a probe for optical near-fields	p. 155
Morphology of near field-induced damage sites	p. 156
Parameters influencing field enhancement induced ablation	p. 159
Near field effects in the laser cleaning process	p. 162
Experimental details	p. 162
Variation of the size parameter	p. 163
Variation of the particle size	p. 164
Variation of the laser wavelength	p. 167
Influence of incident angle	p. 168
Influence of surface roughness	p. 169
Conclusion	p. 170
Acknowledgements	p. 172
References	p. 172
Steam Laser Cleaning
Pulsed laser cleaning of particles from surfaces and optical materials	p. 181
Introduction	p. 181
Review tables of experimental pulsed laser cleaning of contaminants (mostly particles) from surfaces	p. 185
Overview of the information in the tables	p. 185
Silicon-wafers, hydrophilic and membrane masks	p. 190
Glass and related optical surfaces	p. 196
Other material surfaces	p. 198
Experimental studies of laser cleaning particles from glass at Macquarie University	p. 198
Single pulse laser cleaning studies	p. 198
"Dip and tap" sample preparation	p. 198
Dry/Damp laser cleaning	p. 199
Before and after images--microscope slides and fused silica	p. 211
Cleaning efficiency measured from optical microscopy images	p. 214
Particle de-agglomeration and removal	p. 214
Laser cleaning efficiency as a function of pulse fluence	p. 218
Laser cleaning threshold fluence measurement	p. 220
Concluding remarks	p. 222
Acknowledgments	p. 223
References	p. 223
Liquid-Assisted Pulsed Laser Cleaning with Near Infrared and Ultraviolet-Pulsed Lasers	p. 229
Introduction	p. 229
Experiments	p. 232
Laser cleaning system and optical diagnostics	p. 232
Operation parameters and experimental procedures	p. 236
Experimental results	p. 236
Excimer laser cleaning	p. 236
Nd: YAG laser cleaning	p. 237
Summary of cleaning results	p. 240
Physical mechanisms	p. 241
In-situ monitoring of reflectance and visualization	p. 241
Temperature, pressure, and bubble dynamics	p. 242
Conclusion	p. 252
Acknowledgments	p. 252
References	p. 252
Steam Laser Cleaning of Silicon Wafers: Laser Induced Bubble Nucleation and Efficiency Measurements	p. 255
Introduction	p. 256
Experimental	p. 257
Sample preparation	p. 258
Laser sources	p. 259
Surface plasmon probe and optical reflectance probe	p. 260
Scattered light probe	p. 262
Evaluation of the cleaning efficiency	p. 262
Determination of laser fluence	p. 263
Laser induced bubble nucleation and pressure generation	p. 264
Theoretical background	p. 265
Kinetic limit of superheating	p. 265
Nucleation theory	p. 267
Experiments on metal films	p. 272
Detection of bubble nucleation via SPP	p. 272
Bubble nucleation on silicon wafers	p. 282
Water at smooth silicon wafers	p. 283
Water at structured silicon substrates	p. 289
IPA on smooth silicon wafers	p. 292
Heat transfer coefficient	p. 292
Removal of particles on surfaces via laser induced bubble nucleation: steam laser cleaning	p. 294
Efficiency measurements	p. 296
Dependence on the number of applied laser pulses	p. 296
Dependence on the laser fluence and variation on the particle size	p. 298
Discussion and concluding remarks	p. 300
Acknowledgments	p. 304
References	p. 305
Physical Mechanisms of Laser Cleaning	p. 311
Introduction	p. 311
Laser cleaning of the solid surface from particles	p. 312
Dry laser cleaning	p. 313
The cleaning force	p. 313
Surface cleaning condition	p. 316
Dry laser cleaning in the multipulse regime	p. 316
Discussion	p. 318
Steam laser cleaning	p. 319
Absorbing particles at the transparent substrate	p. 319
Transparent particles at the absorbing substrate	p. 321
Absorbing particles at the absorbing substrate	p. 326
Discussion	p. 327
Laser cleaning of the solid surface from films	p. 327
Laser cleaning by buckling mechanism	p. 328
The main regularities and regimes of film buckling	p. 329
Film ablation without melting before separation of the film fragment	p. 331
Ablation of the melting film	p. 331
Film degradation	p. 334
Laser cleaning by film shaking-off	p. 337
The conditions of action of shaking-off and buckling mechanisms of film ablation	p. 337
Other mechanisms of laser cleaning of solid surfaces from films	p. 338
Conclusion	p. 339
Acknowledgments	p. 340
References	p. 340
Laser Cleaning of Artworks
Laser Ablation in Cleaning of Artworks	p. 343
Introduction	p. 343
Laser ablation of complex polymerized materials	p. 344
Optimization of laser parameters	p. 344
Ablation efficiency studies	p. 346
Light transmission studies	p. 353
Chemical alteration of substrate	p. 355
Laser-assisted removal of aged varnish from paintings	p. 358
Laser-assisted removal of paint from composite materials	p. 365
Laser divestment of encrustation	p. 370
Major operative mechanisms and associated optical phenomena	p. 370
Removal of encrustation--test case studies	p. 380
Conclusions	p. 384
Acknowledgments	p. 385
References	p. 385
On the Theory of Discoloration Effect in Pigments at Laser Cleaning	p. 393
Introduction	p. 393
The thermal ablation model	p. 395
Method of moments	p. 398
Thermal field within the ablated material. Numerical results	p. 402
Kinetics of phase transition and surface modification	p. 405
Acknowledgments	p. 411
References	p. 411
Applications of Laser Cleaning
Cleaning for Field Emitter Arrays	p. 417
Introduction	p. 417
Experimental procedures	p. 419
Laser light irradiation	p. 420
Laser irradiation modes	p. 420
Laser irradiation without field emission	p. 420
Laser irradiation with field emission	p. 422
IR and visible laser light ([lambda] = 1047 and 523.5 nm) irradiation	p. 422
UV laser light ([lambda] = 349 nm) irradiation	p. 422
UV laser light ([lambda] = 262 nm) irradiation	p. 429
Conclusions	p. 430
Acknowledgments	p. 431
References	p. 431
Laser Cleaning of Organic Contamination on Microelectronic Devices and Process Real-Time Monitoring	p. 433
Introduction	p. 436
Experimental setup	p. 438
Results and discussion	p. 438
Laser cleaning of flexible circuit for inkjet printer cartridge	p. 438
Laser deflashing of IC packages	p. 441
Signal generation and diagnostics during the laser cleaning	p. 448
Audible acoustic wave generation	p. 451
Diagnostics of plasma-induced electric field	p. 456
Detection of plasma optical signal	p. 457
Conclusions	p. 460
Acknowledgments	p. 461
References	p. 461
Subject Index	p. 465
Table of Contents provided by Syndetics. All Rights Reserved.

Laser Cleaning

At a Glance

Hardcover

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