Introduction to Microlithography

By: Larry F. Thompson (Editor), C. Grant Willson (Editor), Murrae J. Bowden (Editor)

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Hardcover | 1 January 1994 | Edition Number 2

At a Glance

Hardcover
540 Pages

Edition Type
Revised

Dimensions(cm)
23.47 x 15.19 x 3.56

Hardcover

$466.75

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Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

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