High-Resolution X-Ray Scattering

From Thin Films to Lateral Nanostructures

By: Ullrich Pietsch, Vaclav Holy, Tilo Baumbach

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Hardcover | 27 August 2004 | Edition Number 2

At a Glance

Hardcover
428 Pages

Edition Type
Revised

Dimensions(cm)
23.5 x 15.5

Hardcover

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During the last 20 years interest in high-resolution x-ray diffractometry and reflectivity has grown as a result of the development of the semiconductor industry and the increasing interest in material research of thin layers of magnetic, organic, and other materials. For example, optoelectronics requires a subsequent epitaxy of thin layers of different semiconductor materials. Here, the individuallayer thicknesses are scaled down to a few atomic layers in order to exploit quantum effects. For reasons of electronic and optical confinement, these thin layers are embedded within much thicker cladding layers or stacks of multilayers of slightly different chemical composition. It is evident that the interface quality of those quantum weHs is quite important for the function of devices. Thin metallic layers often show magnetic properties which do not ap pear for thick layers or in bulk material. The investigation of the mutual interaction of magnetic and non-magnetic layers leads to the discovery of colossal magnetoresistance, for example. This property is strongly related to the thickness and interface roughness of covered layers.

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Non-Fiction Engineering & Technology Mechanical Engineering & Materials Materials Science Other Technologies & Applied Sciences Applied Optics Technology in General Nanotechnology Science Physics Materials & States of Matter Optical Physics

Experimental Realization
Elements for Designing an X-Ray Diffraction Experiment	p. 5
X-Ray Sources	p. 5
Optical Elements	p. 11
Detectors	p. 23
Diffractometers and Reflectometers	p. 31
X-Ray Reflectometers	p. 32
High-Resolution Diffractometer	p. 37
Limits of the Use of Powder Diffractometers	p. 39
Grazing-Incidence Diffraction	p. 40
Scans and Resolution in Angular and Reciprocal Space	p. 43
Coherence of Radiation and Correlation of Sample Properties	p. 44
Scans Across the Reciprocal Space	p. 47
Resolution Elements	p. 51
Basic Principles
Basic Principles	p. 63
Description of the X-Ray Wavefield in Vacuum	p. 63
General Description of the Scattering Process	p. 65
Direction of Scattered Waves	p. 68
Kinematical Theory	p. 75
Scattering From a Perfect Layer	p. 75
Two-Beam Approximation	p. 81
Kinematical Scattering From Deformed Crystals	p. 85
Kinematical Scattering From Multilayers	p. 87
Kinematical Scattering From Randomly Deformed Crystals	p. 91
Dynamical Theory	p. 97
The Wave Equation for a Periodic Medium	p. 97
Boundary Conditions	p. 99
X-Ray Reflection	p. 102
Two-Beam Diffraction	p. 104
Layered Samples	p. 112
Multilayers: X-Ray Reflection	p. 116
Multilayers: Conventional X-Ray Diffraction	p. 117
A Comment on the Three-Beam Diffraction	p. 119
Semikinematical Theory	p. 123
Basic Formulas	p. 123
Examples	p. 125
Small-Angle Scattering from Empty Holes in a Semi-infinite Matrix	p. 125
Small-Angle Scattering from Pyramidal Islands Randomly Placed on a Flat Surface	p. 128
Diffuse Scattering in Diffraction from Empty Holes in a Crystal	p. 129
Diffraction from a Thin Layer on a Semi-infinite Substrate	p. 132
Solution of Experimental Problems
Determination of Layer Thicknesses of Single Layers and Multilayers	p. 143
X-Ray Reflection by Single Layers	p. 144
X-Ray Reflection by Periodical Multilayers	p. 153
Coplanar X-Ray Diffraction by Single Layers	p. 161
Coplanar X-Ray Diffraction by Periodical Superlattices	p. 166
X-Ray Grazing Incidence Diffraction	p. 171
Buried Layers	p. 174
Lattice Parameters and Strains in Epitaxial Layers and Multilayers	p. 179
Conventional Coplanar Diffraction	p. 179
Reciprocal-Space Mapping	p. 190
Coplanar Extremely Asymmetric Diffraction	p. 193
Utilization of Anomalous Scattering Effects	p. 197
Grazing-Incidence Diffraction	p. 198
Diffuse Scattering From Volume Defects in Thin Layers	p. 205
Weak and Strong Defects	p. 205
Diffuse Scattering From Weak Defects	p. 207
Weak Defects in a Subsurface Layer	p. 215
Small-Angle Scattering From Small Defects in Thin Layers	p. 223
Diffuse Scattering From an Array of Misfit Dislocations	p. 225
Diffuse Scattering From Mosaic Layers	p. 228
X-Ray Scattering by Rough Multilayers	p. 235
Interface Roughness, Scattering Potential, and Statistical Properties	p. 236
Specular X-Ray Reflection	p. 241
Non-Specular X-Ray Reflection	p. 252
General Approach	p. 252
Resonant Diffuse Scattering	p. 260
Dynamical Scattering Effects	p. 263
Non-Coplanar X-Ray Reflection	p. 265
Interface Roughness in Surface-Sensitive Diffraction Methods	p. 267
X-Ray Scattering by Laterally Structured Semiconductor Nano-Structures
X-Ray Scattering by Artificially Lateral Semiconductor Nanostructures	p. 279
The Scattering Potential and the Structure Amplitude	p. 280
Kinematical Theory	p. 286
Dynamical Theory	p. 287
Distorted Wave-Born Approximation for Grazing-Incidence Diffraction	p. 291
Distorted Wave-Born Approximation for X-Ray Diffraction	p. 294
Determination of the Lateral Superstructure	p. 299
Grating Period and the Etching Depth	p. 299
Reciprocal-Space Mapping	p. 300
Orientation of the Grating Pattern	p. 303
Grating Shape	p. 305
Superlattice Surface Gratings	p. 310
Shape and the Morphological Set-Up of a Multilayer Grating	p. 311
Non-Epitaxial Gratings	p. 312
Strain Analysis in Periodic Nanostructures	p. 317
Strain Analysis in Surface Gratings	p. 318
Simple Strain Models	p. 319
Full Quantitative Strain Analysis by Coupling Elasticity Theory and X-Ray Diffraction	p. 324
Strain in Superlattice Surface Gratings	p. 329
Quantum Dots	p. 332
Strain Evolution Due to Embedding	p. 334
Strain Optimization and Strain-Induced Band Gap Engineering	p. 340
Strain-Induced Morphological Ordering in Buried Gratings	p. 343
Induced Strain Gratings in Planar Structures	p. 345
Periodic Dislocation Network in Wafer-Bonded Samples345
Dynamical Strain Gratings	p. 350
X-Ray Scattering from Self-Organized Structures	p. 353
Self-Organizing Growth Modes	p. 353
Small-Angle X-Ray Scattering from Self-Organized Nanostructures	p. 357
Short-Range-Order Model	p. 359
Long-Range-Order Model	p. 362
Two-Dimensional Gas of Objects	p. 364
X-Ray Diffraction from Self-Organized Nanostructures	p. 368
References	p. 389
Index	p. 403
Table of Contents provided by Publisher. All Rights Reserved.

High-Resolution X-Ray Scattering

From Thin Films to Lateral Nanostructures

At a Glance

Hardcover

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An Introduction

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