Green Etching Techniques for MEMS Applications

Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems

By: Kaiying Wang

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eText | 19 December 2025 | Edition Number 1

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Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems delivers an essential and comprehensive exploration of sustainable, fluorine-free etching methodologies for micro-electro-mechanical systems (MEMS). With growing environmental concerns around traditional MEMS fabrication, this book addresses a critical issue by detailing advanced, eco-friendly alternatives that mitigate environmental impacts without compromising technical performance. Covering a spectrum of innovative etching technologies, from dry and wet chemistries to electrochemical and AI-enhanced hybrid methods, the book offers practical guidance, robust theoretical foundations, and insights from real-world industrial case studies. It is a crucial resource for professionals, researchers, and students dedicated to advancing the sustainability of MEMS fabrication.

Features:

Thorough analysis of fluorine-free, environmentally friendly MEMS etching alternatives
Coverage of emerging technologies, including supercritical CO?, ionic liquids, and gas-phase selective etching
Exploration of AI-driven process optimization for sustainable and efficient MEMS manufacturing
Detailed industrial case studies highlighting successful implementation and scalability
Clear discussions on regulatory drivers, market trends, and future roadmaps for sustainable microfabrication