Glow Discharge Processes
Sputtering and Plasma Etching
By: Brian Chapman
Hardcover | 11 September 1980 | Edition Number 1
At a Glance
Hardcover
RRP $520.25
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ISBN: 9780471078289
ISBN-10: 047107828X
Published: 11th September 1980
Format: Hardcover
Language: English
Number of Pages: 432
Audience: Professional and Scholarly
Publisher: John Wiley & Sons Inc (US)
Country of Publication: US
Edition Number: 1
Dimensions (cm): 24.05 x 16.35 x 3.27
Weight (kg): 0.84
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