Excimer Laser Technology

By: Dirk Basting (Editor), Gerd Marowsky (Editor)

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Hardcover | 21 April 2005

At a Glance

Hardcover
458 Pages

Dimensions(cm)
23.5 x 16.51 x 1.91

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A timely and comprehensive survey, Excimer Laser Technology reports on the current status and range of the underlying technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F₂laser technology.Additional chapters on optics, devices and laser systems complete this compact handbook. Because it offers an effective and understandable introduction to the current and future status of the field, Excimer Laser Technology is valuable reading for laser technology students, process application researchers, engineers or anyone interested in this increasingly important area.

Industry Reviews

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"This book is one of the few books devoted to excimer lasers and their applications. ... anyone working in the field of lasers or materials processing can take advantage of it. The editor has done the effort to include a list of abbreviations and also an alphabetic register, which enhances the usefulness of the book. The quality of printing and layout is perfect." (Erik Stijns, Physicalia, Vol. 28 (4-6), 2006)

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Introduction.-
Fundamentals
Some Fundamentals of Laser Physics
Principles of Excimer Lasers
Design and Technology of Excimer Lasers
Specially Designed Excimer Lasers
Excimer Lasers for Microlithography
Laser Beam Characterization
Optical Coatings for Excimer Laser Applications
Small Structures with Large Excimer Lasers
Applications: Overview
Ablative Micro-Fabrication
Micro-Processing of Borosilicate Glass and Polymers
F2-Laser Microfabrication for Photonics and Biophotonics
Nano-Structuring with Femtosecond Excimer Laser Pulses
Physical Aspects of Ultra-Fast UV Laser Transfer
Material Modification
Excimer-Laser Assisted Deposition of Carbon and Boron Nitride-Based High-Temperature Superconducting Films
Combustion Analysis
Medical Applications of Excimer Lasers
High-Intensity Applications of Excimer Lasers
High-Repetition-Rate Applications of Excimer Lasers
New Frontiers: Extreme-Ultraviolet (EUV) Technology at 13.5 nm
Table of Contents provided by Publisher. All Rights Reserved.

Excimer Laser Technology

At a Glance

Hardcover

Industry Reviews

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