An Introduction to Microelectromechanical Systems Engineering

By: Nadim Maluf

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Hardcover | 30 November 1999

At a Glance

Hardcover
292 Pages

Dimensions(cm)
24.13 x 16.51 x 2.54

New Edition

Published: 31st July 2004

Hardcover

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Here's the first non-technical introduction to the exciting field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS -- including silicon, polymers and glass and quartz substrates -- as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using techniques such as oxidation, lithography, chemical vapor deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defense. A unique element of this book is its look at the future of MEMS -- its potential for microelectrode arrays, actuators and optical switches and other technologies.

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You Can Find This Book In

Non-Fiction Engineering & Technology Electronics & Communications Engineering Electronics Engineering Science Physics Electricity Mechanical Engineering & Materials Mechanical Engineering Energy Technology & Engineering Electrical Engineering

MEMS: A Technology from Lilliput
The Sandbox: Materials for MEMS
The Toolbox: Processes for Micromachining
MEM Structure and Systems in Industrial and Automotive Applications
Optical MEM Structures and Systems
MEM Structures and Systems for Medical Applications
MEM Structures and Systems for Electronic Applications
Packaging & Reliability for MEMS
Glossary
Table of Contents provided by Publisher. All Rights Reserved.

An Introduction to Microelectromechanical Systems Engineering

At a Glance

New Edition

Hardcover

Shipping

How to return your order

Defective items

You Can Find This Book In

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