| |
| Preface | p. xiii |
| Introduction | p. xv |
| Statistical Aspects for Reliability | p. 1 |
| An Overview of the Role of Statistics | p. 1 |
| Basic Notation and Terminology | p. 2 |
| Concepts of Probability Distributions and Probability Densities | p. 3 |
| Probability Distribution Functions | p. 4 |
| Important Functions | p. 7 |
| Statistical Measures | p. 11 |
| Statistical Inference | p. 13 |
| Distributions for Inference | p. 14 |
| Estimation | p. 15 |
| Hypothesis Testing | p. 16 |
| The Central Limit Theorem | p. 19 |
| Experimental Design | p. 20 |
| The Sampling Process | p. 20 |
| Selecting the Sample | p. 20 |
| Sampling Procedures | p. 21 |
| Failure Mechanisms in Microelectronic Devices | p. 25 |
| Introduction | p. 25 |
| Scope--Types of Microelectronic Devices | p. 26 |
| Failure Modes and Failure Mechanisms | p. 28 |
| Yield and Reliability | p. 29 |
| Types of Stresses | p. 30 |
| Failure Analysis | p. 31 |
| Designing-in Reliability versus Screening | p. 33 |
| Semiconductor Bulk Failure Mechanisms | p. 34 |
| Second Breakdown | p. 34 |
| Latch-Up | p. 34 |
| Single-Event Upset | p. 36 |
| Bulk Radiation Effects | p. 37 |
| Chip Fracture | p. 38 |
| Semiconductor-Dielectric Interface Failure Mechanisms | p. 38 |
| Alkali Ion Migration | p. 39 |
| Slow Trapping Instability | p. 40 |
| Hot-Carrier Effects | p. 42 |
| Surface Charge Spreading | p. 43 |
| Polarization | p. 44 |
| Ionizing Radiation Effects | p. 45 |
| Dielectric Effects | p. 45 |
| Time-Dependent Dielectric Breakdown | p. 46 |
| Dielectric Wearout | p. 47 |
| Fracture of Dielectric | p. 48 |
| Passivation Layers | p. 48 |
| Breakdown due to EOS or ESD | p. 49 |
| Conductor and Metalization Failure Mechanisms | p. 50 |
| Electromigration | p. 50 |
| Failure at Microcracks | p. 53 |
| Corrosion Effects | p. 54 |
| Metal Migration | p. 55 |
| Contact Spiking | p. 55 |
| Hillock Formation | p. 56 |
| Assembly and Packaging-Related Failure Mechanisms | p. 57 |
| Failure Mechanisms in Die Bonds | p. 57 |
| Wire Bonds | p. 57 |
| Purple Plague | p. 58 |
| Failure Mechanisms in Hermetically Sealed Packages | p. 59 |
| Contaminant Effects | p. 59 |
| Plastic Encapsulation-Related Failures | p. 60 |
| Device Metal Pattern Distortion by Plastic | p. 61 |
| Plastic-Induced Device Stress Effects | p. 61 |
| Effects of Technology Trends | p. 61 |
| Technology Trends | p. 62 |
| Scaling to Smaller Dimensions | p. 62 |
| Increased Device Complexity | p. 64 |
| Tradeoffs | p. 64 |
| Reliability Trends | p. 65 |
| Testability for Functional Verification and Diagnostics | p. 89 |
| Introduction | p. 89 |
| Objective and Terminology for Digital Testing | p. 90 |
| Definition of Most Frequently Used Terms | p. 90 |
| Fault Models | p. 91 |
| Testing Objectives | p. 95 |
| Test Pattern Generation | p. 95 |
| Test Pattern Validation | p. 96 |
| Test Pattern Application | p. 100 |
| Structured Design for Testability Techniques | p. 101 |
| Level-Sensitive Scan Design (LSSD) | p. 102 |
| Scan Path | p. 105 |
| Scan-Set Logic | p. 106 |
| Random Access Scan | p. 109 |
| Incomplete Scan Path Design | p. 110 |
| Built-in Self-Testing | p. 112 |
| Signature Analysis | p. 114 |
| Built-in Logic Block Observer | p. 123 |
| Summary | p. 124 |
| Automatic Testing | p. 129 |
| Introduction | p. 129 |
| Overview of Testing | p. 130 |
| The Test Philosophy | p. 132 |
| The Evolution of Test Engineering | p. 133 |
| Automatic Testing and the ATE | p. 134 |
| Introduction to Automatic Testing | p. 134 |
| ATE Building Blocks | p. 134 |
| Using an ATE | p. 140 |
| The ATE Investment | p. 142 |
| The IC Under Test | p. 144 |
| Types of ICs | p. 145 |
| Types of Tests | p. 147 |
| Tester Independence | p. 151 |
| Test Program Set Development | p. 153 |
| What is a Test Program Set? | p. 153 |
| Manual Test Generation | p. 154 |
| Simulation | p. 157 |
| Physical Emulation | p. 174 |
| Automatic Test Generation | p. 177 |
| Interfaces | p. 186 |
| Summary of TPS Development | p. 191 |
| ATE Economics | p. 191 |
| Why Do ICs Fail? | p. 203 |
| The Economics of IC Burn-In | p. 203 |
| The Economics of Testability | p. 205 |
| Summary of ATE Economics | p. 208 |
| Summary | p. 208 |
| Manufacturing Process Control | p. 215 |
| Introduction | p. 215 |
| Process Characterization | p. 217 |
| Process Capability Studies | p. 219 |
| Factors Internal to the Manufacturing Process | p. 220 |
| External Sources of Variation | p. 223 |
| Determining the Process Capability | p. 225 |
| Major Steps in a Process Capability Study | p. 225 |
| Control Charts | p. 229 |
| Investigation of Out-of-Control Conditions | p. 234 |
| Process Optimization | p. 235 |
| Process and Product Control and Monitoring | p. 236 |
| The Need for Control and Monitoring | p. 236 |
| Process Control | p. 236 |
| Statistical Sampling | p. 237 |
| Process and Product Improvement | p. 238 |
| GaAs Reliability and Test | p. 241 |
| Technology Description | p. 241 |
| Introduction | p. 241 |
| Digital GaAs IC Structures | p. 243 |
| GaAs MMIC Structures | p. 247 |
| In-Process Test | p. 247 |
| Test Structures | p. 249 |
| Electrostatic Discharge Protection | p. 253 |
| Digital GaAs ICs | p. 253 |
| Digital Circuit Design with GaAs MESFETs | p. 253 |
| Digital GaAs Circuit Packaging | p. 263 |
| Digital Circuit Testing | p. 265 |
| GaAs Microwave Circuits | p. 266 |
| Introduction | p. 266 |
| Components for GaAs MMICs | p. 266 |
| Circuit Design | p. 280 |
| RF Testing | p. 284 |
| Reliability of GaAs Microelectronics | p. 286 |
| Failure Mechanisms | p. 286 |
| Radiation Effects | p. 296 |
| Life Testing of GaAs ICs | p. 302 |
| Advanced Failure Analysis Instrumentation | p. 313 |
| List of Acronyms | p. 359 |
| Glossary | p. 361 |
| Index | p. 367 |
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