Plasma Electronics

Applications in Microelectronic Device Fabrication

By: Toshiaki Makabe, Zoran Lj. Petrovic

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eText | 27 August 2014 | Edition Number 2

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Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental