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Modeling MEMS and NEMS - John A. Pelesko

Modeling MEMS and NEMS

By: John A. Pelesko, David H. Bernstein

eText | 25 November 2002 | Edition Number 1

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Designing small structures necessitates an a priori understanding of various device behaviors. The way to gain such understanding is to construct, analyze, and interpret the proper mathematical model.

Through such models, Modeling MEMS and NEMS illuminates microscale and nanoscale phenomena, thereby facilitating the design and optimization o

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