Microsystems Dynamics

By: Rolanas Dauksevicius, Vytautas Ostasevicius

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Hardcover | 11 November 2010

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224 Pages

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In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added benefits of lightweight, miniature size and low energy consumption make MEMS commercialization very attractive. Modeling and simulation is an indispensable tool in the process of studying these new dynamic phenomena, development of new microdevices and improvement of the existing designs. MEMS technology is inherently multidisciplinary since operation of microdevices involves interaction of several energy domains of different physical nature, for example, mechanical, fluidic and electric forces. Dynamic behavior of contact-type electrostatic microactuators, such as a microswitches, is determined by nonlinear fluidic-structural, electrostatic-structural and vibro-impact interactions. The latter is particularly important: Therefore it is crucial to develop accurate computational models for numerical analysis of the aforementioned interactions in order to better understand coupled-field effects, study important system dynamic characteristics and thereby formulate guidelines for the development of more reliable microdevices with enhanced performance, reliability and functionality.

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You Can Find This Book In

Non-Fiction Engineering & Technology Technology in General Nanotechnology Technical Design Mechanical Engineering & Materials Mechanical Engineering Engineering in General Industrial Chemistry & Manufacturing Technologies Other Manufacturing Technologies Precision Instruments Manufacture Computing & I.T.

Computer Science Artificial Intelligence Materials Science Mechanics of Solids Electronics & Communications Engineering Electronics Engineering

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Paperback

Published: 2nd January 2013

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Introduction	p. 1
Review of Microelectromechanical Systems (MEMS)	p. 1
MEMS Production Technologies	p. 3
Common MEMS Actuators	p. 3
RF MEMS and Microswitches	p. 4
Applications of MEMS Micromotors	p. 5
Importance of Dynamics	p. 7
References	p. 8
Modeling and Simulation of Contact-Type Electrostatic Microactuator	p. 11
Three-Dimensional Finite Element Model of a Microcantilever	p. 11
Finite Element Modeling and Simulation of Fluidic-Structural Interaction	p. 13
Model Formulation	p. 13
Numerical Analysis of Influence of Squeeze-Film Damping on Vibrations of Microcantilever	p. 16
Finite Element Modeling and Simulation of Electrostatic-Structural Interaction	p. 28
Model Formulation	p. 28
Numerical Analysis of Microswitch Operational Characteristics	p. 32
Finite Element Modeling and Simulation of Vibro-Impact Interaction	p. 44
Model Formulation	p. 44
Numerical Analysis of Contact Bouncing	p. 46
References	p. 51
Dynamics of Elastic Vibro-Impact Microsystems	p. 53
Mathematical Modeling	p. 53
Free Transverse Impact Vibrations of Microcantilever	p. 55
Temporal Characteristics of Vibro-Impact Microsystem with Rigid Support	p. 63
Dynamic Characteristics of Microsystem Composed of Two Microcantilevers	p. 68
Control of Vibration Modes of Links of Vibro-Impact Microsystems	p. 86
Analysis of Forced Vibrations of Microcantilever	p. 94
Vibrational Stability of Vibro-Impact Microsystems	p. 103
Diagnostics of Parameters of Vibro-Impact Microsystems	p. 107
Optimization Results for Structures Undergoing Periodic and Transient Vibrations	p. 113
Optimization Results of Structures Undergoing Periodic Vibrations	p. 114
Optimization Results for Structures Undergoing Transient Vibrations	p. 122
References	p. 132
Theoretical Analysis of a Micromotor	p. 133
Finite Element Modeling Procedure	p. 134
Scaling in MEMS	p. 137
Modal Analysis of a Microrotor	p. 138
Dynamics of MEMS Structures in Viscous Medium	p. 146
Modeling of Micromotor in Viscous Media	p. 149
Control of a Micromotor	p. 152
Analytical Model of a Micromotor	p. 153
Simplified Electrostatic-Mechanical Scheme	p. 160
Moment of Rotation Produced by a Single Pole	p. 161
Modeling of Torque of a Micromotor	p. 165
Micromotor Torque and Switching Sequences	p. 171
References	p. 182
Technological Realization of MEMS Structures and Their Experimental Investigation	p. 185
Fabrication of Micromotor Prototypes	p. 186
Features of Produced Micromotors	p. 190
Micromotor Control Device	p. 194
Design of Electrostatic Microswitches	p. 197
Surface Micromachining Technology for Fabrication of Microswitches	p. 200
Electrical Probe Testing of Fabricated Microswitches	p. 202
Laser Measurements of Microcantilever Vibrations	p. 205
References	p. 213
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Microsystems Dynamics

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Hardcover

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