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Microelectronic Materials : Graduate Student Series in Materials Science and Engineering - C. Grovenor

Microelectronic Materials

By: C. Grovenor

Paperback | 1 January 1989 | Edition Number 1

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This practical book shows how an understanding of structure, thermodynamics, and electrical properties can explain some of the choices of materials used in microelectronics, and can assist in the design of new materials for specific applications. It emphasizes the importance of the phase chemistry of semiconductor and metal systems for ensuring the long-term stability of new devices. The book discusses single-crystal and polycrystalline silicon, aluminium- and gold-based metallisation schemes, packaging semiconductor devices, failure analysis, and the suitability of various materials for optoelectronic devices and solar cells. It has been designed for senior undergraduates, graduates, and researchers in physics, electronic engineering, and materials science.
Industry Reviews
"a splendid book and I shall certainly be recommending it to my students." Professor C J Humphreys, Contemporary Physics ndid book and I shall certainly be recommending it to my students." Professor C J Humphreys, Contemporary Physics

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