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Micro and Nano Machined Electrometers - Yong Zhu

Micro and Nano Machined Electrometers

By: Yong Zhu

eText | 13 February 2020 | Edition Number 1

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This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors.

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Non-FictionEngineering & TechnologyElectronics & Communications EngineeringElectronics EngineeringCircuits & ComponentsTechnology in GeneralNanotechnologyIndustrial Chemistry & Manufacturing TechnologiesOther Manufacturing TechnologiesPrecision Instruments Manufacture

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